Touch panel display

ABSTRACT

A touch panel display includes a pixel including an organic EL element, a first transistor electrically connected to the power supply line and the organic electroluminescence element, and a second transistor electrically connected to the data signal line and the first transistor, a touch sensor overlapping the pixel, and a shield electrode between the pixel and the touch sensor. The shield electrode includes an opening in a region overlapping with the second transistor, the third gate electrode is disposed inside the opening, and the third gate electrode and the fourth gate electrode are electrically connected, the first gate electrode is electrically connected to the shield electrode, and the second gate electrode is connected to a drain of the second transistor, and the shield electrode is grounded.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a continuation of U.S. patent application Ser. No. 16/866,686filed May 5, 2020, which is a continuation of U.S. patent applicationSer. No. 16/022,516 filed on June 28, 2018, which claims the benefit ofpriority from the prior Japanese Patent Application No. 2018-079903filed on Apr. 18, 2018, the entire contents of which are incorporatedherein by reference.

FIELD

An embodiment of the present invention relates to a touch panel display(also referred to as a “display device having a touch detectionfunction”) and a method for manufacturing the same. For example, anembodiment of the present invention relates to a display device thatuses an organic electroluminescence element as a display element andincludes a built-in touch sensor.

BACKGROUND

A so-called in-cell type touch panel display that uses a liquid crystaldisplay element as a display element and includes a common electrode ofa liquid crystal element and an electrostatic capacitance-type touchdetection electrode in an integrated manner in a liquid crystal panel isdisclosed (see, for example, Japanese Laid-Open Patent Publication No.2012-073783).

A conventional touch panel display is manufactured as including a glasssubstrate. Therefore, even if an in-cell system is adopted, there is alimit on reduction of the thickness of the touch panel display. Inaddition, as long as a glass substrate is used, there is a problem thata display having flexibility (so-called flexible display) is notrealized.

SUMMARY

A touch panel display in an embodiment according to the presentinvention includes a transparent resin substrate; a touch sensorembedded in the transparent resin substrate; pixels each including afirst transistor and an organic electroluminescence element electricallyconnected with the first transistor; a display portion including anarray of the pixels; and a shield electrode located between the touchsensor and the display portion. The pixels emitted light toward thetransparent resin substrate.

A touch panel display in an embodiment according to the presentinvention includes a display portion including a video signal line and ascanning signal line; a touch sensor electrode including a first sensorelectrode (receiver electrode) and a second sensor electrode(transmitter electrode); and a driving circuit located outer to thedisplay portion and the touch sensor. The driving circuit includes avideo signal line driving circuit outputting a video signal to the videosignal line, a scanning signal line driving circuit outputting a timingsignal, synchronized to the video signal, to the scanning signal line, asensing circuit receiving a detection signal output from the firstsensor electrode (receiver electrode) and outputting a sensing signal,and a scanning circuit outputting a driving signal to the second sensorelectrode (transmitter electrode), and the driving circuit includes thevideo signal line driving circuit, the scanning signal line drivingcircuit, the sensing circuit and the scanning circuit in an integratedmanner.

A method for manufacturing a touch panel display in an embodimentaccording to the present invention includes forming a transparent resinsubstrate including a touch sensor including a first sensor electrodeextending in a first direction and a second sensor electrode extendingin a second direction crossing the first direction; forming a shieldelectrode covering the touch sensor; and forming, on the transparentresin substrate, a display portion including pixels each including atransistor and an organic electroluminescence element electricallyconnected with the transistor.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a plan view showing a structure of a touch panel display in anembodiment according to the present invention;

FIG. 2 is a perspective view showing a structure of the touch paneldisplay in an embodiment according to the present invention;

FIG. 3 shows an example of equivalent circuit of a pixel in the touchpanel display in an embodiment according to the present invention;

FIG. 4 is a plan view showing a structure of the pixel in the touchpanel display in an embodiment according to the present invention;

FIG. 5A and FIG. 5B are each a cross-sectional view showing a structureof the pixel in the touch panel display in an embodiment according tothe present invention;

FIG. 6 is a plan view showing a structure of a touch sensor included inthe touch panel display in an embodiment according to the presentinvention;

FIG. 7 is a plan view showing a structure of the touch sensor includedin the touch panel display in an embodiment according to the presentinvention;

FIG. 8 is a plan view showing a structure of the touch sensor includedin the touch panel display in an embodiment according to the presentinvention;

FIG. 9 schematically shows a cross-sectional structure of the touchpanel display in an embodiment according to the present invention;

FIG. 10A and FIG. 10B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 11A and FIG. 11B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 12A to FIG. 12E are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention, specifically, a step of patterningby use of multiple tone exposure;

FIG. 13A and FIG. 13B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 14A and FIG. 14B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 15A and FIG. 15B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 16A and FIG. 16B are each a cross-sectional view of the pixelshowing a manufacturing step of the touch panel display in an embodimentaccording to the present invention;

FIG. 17 is a plan view showing a state in which a plurality of displaypanels is formed on a support substrate in a manufacturing step of thetouch panel display in an embodiment according to the present invention;

FIG. 18 shows an example of equivalent circuit of a pixel in a touchpanel display in an embodiment according to the present invention;

FIG. 19 is a plan view showing a structure of the pixel in the touchpanel display in an embodiment according to the present invention;

FIG. 20A and FIG. 20B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 21 shows an example of equivalent circuit of a pixel in a touchpanel display in an embodiment according to the present invention;

FIG. 22 is a plan view showing a structure of the pixel in the touchpanel display in an embodiment according to the present invention;

FIG. 23A and FIG. 23B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 24 shows an example of equivalent circuit of a pixel in a touchpanel display in an embodiment according to the present invention;

FIG. 25 is a plan view showing a structure of the pixel in the touchpanel display in an embodiment according to the present invention;

FIG. 26A and FIG. 26B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 27 is a plan view showing a structure of a pixel in a touch paneldisplay in an embodiment according to the present invention;

FIG. 28A and FIG. 28B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 29A is a cross-sectional view showing a structure of the pixel inthe touch panel display in an embodiment according to the presentinvention;

FIG. 29B shows an equivalent circuit of a capacitance element in thetouch panel display in an embodiment according to the present invention;

FIG. 30 is a plan view showing a structure of a pixel in a touch paneldisplay in an embodiment according to the present invention;

FIG. 31A and FIG. 31B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 32 is a plan view showing a structure of a pixel in a touch paneldisplay in an embodiment according to the present invention;

FIG. 33A and FIG. 33B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 34 is a plan view showing a structure of a pixel in a touch paneldisplay in an embodiment according to the present invention;

FIG. 35A and FIG. 35B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 36 is a plan view showing a structure of electrodes embedded in atouch panel display in an embodiment according to the present invention;

FIG. 37A and FIG. 37B are each a cross-sectional view showing astructure of a pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 38A and FIG. 38B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 39A and FIG. 39B are each a cross-sectional view showing astructure of a pixel in a touch panel display in an embodiment accordingto the present invention;

FIG. 40A and FIG. 40B are each a cross-sectional view showing astructure of the pixel in the touch panel display in an embodimentaccording to the present invention;

FIG. 41A and FIG. 41B are each a plan view showing an example of sensorelectrode of a touch panel display in an embodiment according to thepresent invention;

FIG. 42A and FIG. 42B are each a plan view showing an example of sensorelectrode of the touch panel display in an embodiment according to thepresent invention;

FIG. 43A and FIG. 43B are each a plan view showing an example of sensorelectrode of a touch panel display in an embodiment according to thepresent invention;

FIG. 44A and FIG. 44B are each a plan view showing an example of sensorelectrode of the touch panel display in an embodiment according to thepresent invention;

FIG. 45A and FIG. 45B are each a plan view showing an example of sensorelectrode of a touch panel display in an embodiment according to thepresent invention;

FIG. 46A and FIG. 46B are each a plan view showing an example of sensorelectrode of the touch panel display in an embodiment according to thepresent invention;

FIG. 47A and FIG. 47B are each a cross-sectional view showing an exampleof structure connecting a sensor electrode and a drawing wire in a touchpanel display in an embodiment according to the present invention;

FIG. 48A and FIG. 48B are each a cross-sectional view showing an exampleof structure connecting a sensor electrode and a drawing wire in thetouch panel display in an embodiment according to the present invention;and

FIG. 49 is a cross-sectional view showing an example of structureconnecting a sensor electrode and a drawing wire in the touch paneldisplay in an embodiment according to the present invention.

DESCRIPTION OF EMBODIMENTS

Hereinafter, embodiments of the present invention will be described withreference to the drawings and the like. The present invention may becarried out in various embodiments, and should not be construed as beinglimited to any of the following embodiments. In the drawings, componentsmay be shown schematically regarding the width, thickness, shape and thelike, instead of being shown in accordance with the actual sizes, forthe sake of clear illustration. The drawings are merely examples and donot limit the present invention in any way. Regarding the presentinvention, in the case where a specific component shown in a drawing anda specific component shown in another drawing are the same as, orcorrespond to, each other, the components bear the same reference sign(or the same signs followed by letters “a”, “b” or the like), anddetailed descriptions thereof may be omitted. The terms “first”,“second” and the like used for components are merely provided for thesake of convenience, more specifically, for distinguishing thecomponents from each other, and do not have any other significanceunless otherwise specified.

In the specification, an expression that a component is “on”, “above”,or “below” another component encompasses a case where such a componentis in direct contact with another component and also a case where such acomponent is not in direct contact with another component, namely, acase where still another component is provided between such a componentand another component, unless otherwise specified.

First Embodiment

In this embodiment, a touch panel display having a touch sensor functionof sensing a touch on a screen and a display function of displaying animage on the screen will be described.

1-1. Structured of the Display Device

FIG. 1 shows a structure of a touch panel display 100 in an embodimentaccording to the present invention. The touch panel display 100 includesa transparent resin substrate 124, and a display portion 102, a drivingcircuit portion 104, a terminal portion 106 and a touch sensor 108provided on a first surface of the transparent resin substrate 124. Thedisplay portion 102 includes a plurality of pixels 110. The plurality ofpixels 110 are arrayed in a first direction (e.g., a Y direction shownin FIG. 1) and a second direction crossing the first direction (e.g., anX direction shown in FIG. 1). The plurality of pixels 110 may be arrayedin any of various patterns, for example, a stripe pattern, a deltapattern, a Bayer arrangement, a PenTile matrix, a diamond PenTile matrixor the like.

The touch sensor 108 includes a first sensor electrode 114 and a secondsensor electrode 116. The first sensor electrode 114 has a patternextending in the first direction. The second sensor electrode 116 has apattern extending in the second direction crossing the first direction.The first sensor electrode 114 and the second sensor electrode 116 mayeach have any pattern, for example, a flat plate-like (strip-like)pattern. A plurality of the first sensor electrodes 114 and a pluralityof the second sensor electrodes 116 are provided. The plurality of firstsensor electrodes 114 are arrayed in the second direction, and theplurality of second sensor electrodes 116 are arrayed in the firstdirection. The first sensor electrodes 114 and the second sensorelectrodes 116 are located to cross each other with an insulating layerbeing provided between the first sensor electrodes 114 and the secondsensor electrodes 116.

The terminal portion 106 includes a plurality of terminal electrodes 118located along one side of the transparent resin substrate 124. Theplurality of terminal electrodes 118 are electrically connected with aflexible printed circuit board 122 and act as terminals to which asignal is input from an external circuit.

The driving circuit portion 104 includes a first driving circuit 112 a,a second driving circuit 112 b, and a third driving circuit 112 c. Thefirst driving circuit 112 a, the second driving circuit 112 b and thethird driving circuit 112 c may be located in any manner. For example,the first driving circuit 112 a and the third driving circuit 112 c mayeach include a thin film transistor (TFT) and may be formed on thetransparent resin substrate 124, whereas the second driving circuit 112b may include a semiconductor integrated circuit (LSI) and may bemounted on the flexible printed circuit board 122 in the form of a barechip. The semiconductor integrated circuit mounted on the flexibleprinted circuit board 122 may be referred to also as a “driver IC”. Thesecond driving circuit 112 b may include a video signal processingcircuit 113 outputting a video signal to the plurality of pixels 110 anda sensor signal processing circuit 115 processing a signal from thetouch sensor 108 in an integrated manner. In this manner, the cost formounting the second driving circuit 112 b is decreased.

The display portion 102 and the touch sensor 108 may be located so as topartially or entirely overlap each other. The display portion 102displays an image or a video, and the touch sensor 108 has a function ofsensing a touch or an approach of a finger of a human or the like. Thetouch sensor 108 senses an operation made on a graphic user interface(GUI) such as an icon, a key or the like displayed on the displayportion 102.

The touch sensor 108 has a function of sensing a touch or an approach ofa finger of a human or the like by use of a change in an electrostaticcapacitance. The first sensor electrodes 114 each act as a receiverelectrode (Rx electrode), and sequentially output detection signals(Vdet). The second sensor electrodes 116 each act as a transmitterelectrode (Tx electrode), and are sequentially supplied with commondriving signals (Vcom) from the third driving circuit 112 c.

The touch panel display 100 performs an input/output function by thedisplay portion 102 displaying an image and the touch sensor 108detecting a touch on a screen. The display portion 102 is driven by ascanning signal output from the first driving circuit 112 a and a videosignal output from the second driving circuit 112 b. The touch sensor108 is driven by a detection signal input to any of the first sensorelectrodes 114 via the corresponding terminal electrode 118 and a commondriving signal supplied to any of the second sensor electrodes 116 fromthe third driving circuit 112 c. A graphic user interface (GUI) such asan icon or the like is displayed on the display portion 102 and a touchon the screen is sensed by the touch sensor 108, so that it isdistinguishable whether or not an operation is made on the GUI.

FIG. 2 is a perspective view showing a structure of the touch paneldisplay 100. The touch panel display 100 includes the transparent resinsubstrate 124 in which the first sensor electrodes 114 and the secondsensor electrodes 116 are embedded. The touch sensor 108 includes thefirst sensor electrodes 114 and the second sensor electrodes 116. Thedisplay portion 102 including the array of the pixels 110, the drivingcircuit portion 104, the terminal portion 106 including an array of theterminal electrodes 118 and the like are provided on the transparentresin substrate 124. The shield electrode 126 is provided between thefirst sensor electrodes 114/the second sensor electrodes 116 and thedisplay portion 102. A sealing layer 128 may be provided on the displayportion 102. The sealing layer 128 is provided to protect the displayportion 102 and the driving circuit portion 104. The first sensorelectrodes 114 and the second sensor electrodes 116 embedded in thetransparent resin substrate 124 are each electrically connected with thecorresponding terminal electrode 118 via a contact hole formed in thetransparent resin substrate 124.

The pixels 110 each include a light emitting element. As the lightemitting element, for example, an organic electroluminescence element(hereinafter, also referred to as an “organic EL element”) is used. Thetouch panel display 100 has a so-called bottom emission structure, bywhich light emitted from the pixels 110 is output via the transparentresin substrate 124. Therefore, the transparent resin substrate 124 islight-transmissive. The first sensor electrodes 114, the second sensorelectrodes 116 and the shield electrode 126 are located as overlappingthe pixels 110, and therefore are also light-transmissive. For example,the first sensor electrodes 114, the second sensor electrodes 116 andthe shield electrode 126 are each formed of a transparent conductivefilm. As shown in FIG. 2, the touch panel display 100 has a structure bywhich an image displayed on the display portion 102 is visuallyrecognizable through the transparent resin substrate 124. Namely, thetouch panel display 100 has a structure by which an image displayed onthe display portion 102 is visually recognizable via the touch sensor108.

The sealing layer 128 may have any structure. For example, the sealinglayer 128 is formed of an inorganic insulating film such as a siliconoxide film, a silicon nitride film or the like. Alternatively, thesealing layer 128 may be formed of a resin material such as a polyimideresin, an acrylic resin, an epoxy resin or the like. The sealing layer128 is provided to prevent the light emitting elements provided in thepixels 110 from being deteriorated.

1-2. Equivalent Circuit of the Pixel

FIG. 3 shows an example of equivalent circuit of one pixel 110 a. Thepixel 110 a includes an organic EL element 134, a selection transistor136, a driving transistor 138, and a capacitance element 140. Theselection transistor 136 and the driving transistor 138 each have adual-gate structure in which a semiconductor layer (referred to also asan “active layer”) is held between two gate electrodes. The drivingtransistor 138 includes a first gate electrode 154 and a second gateelectrode 166, and the selection transistor 136 includes a first gateelectrode 156 and a second gate electrode 168.

The selection transistor 136 and the driving transistor 138 are each aninsulating gate-type field effect transistor, in which a source and adrain thereof act as signal input/output terminals and gates thereofeach act as control terminals controlling the transistor to be on oroff. In the equivalent circuit shown in FIG. 3, the selection transistor136 and the driving transistor 138 are each an n-channel typetransistor.

The control terminals of the selection transistor 136 (i.e., the firstgate electrode 156 and the second gate electrode 168) are electricallyconnected with a gate signal line 142 a. One of the input/outputterminals (first terminal: source or drain) of the selection transistor136 is electrically connected with a data signal line 144, and the otherof the input/output terminals (second terminal: drain or source) of theselection transistor 136 is electrically connected with the controlterminals of the driving transistor 138 (the first gate electrode 154and the second gate electrode 166). One of the input/output terminals(first terminal: source) of the driving transistor 138 is electricallyconnected with a common line 146 (146 a, 146 b, 146 c), and the other ofthe input/output terminals (second terminal: drain) of the drivingtransistor 138 is electrically connected with one of terminals (firstterminal) of the organic EL element 134. The capacitance element 140 hasone of terminals thereof (first terminal) electrically connected withthe control terminals of the driving transistor 138 (the first gateelectrode 154 and the second gate electrode 166), and has the other ofthe terminals thereof (second terminal) electrically connected with thecommon line 146 (146 a, 146 b, 146 c). The other of the terminals(second terminal) of the organic EL element 134 is electricallyconnected with a power supply line 148.

The first common line 146 a, the second common line 146 b and the thirdcommon line 146 c are supplied with a certain potential (e.g., groundpotential). The power supply line 148 is supplied with a power supplypotential VDD, which is higher than the potential of the common line146. One of the terminals (first terminal) of the organic EL element 134is a cathode electrode (also referred to as a “cathode” or a “negativeelectrode”), and the other of the terminals (second terminal) of theorganic EL element 134 is an anode electrode (also referred to as an“anode” or a “positive electrode”). When a voltage higher than, or equalto, a threshold voltage is applied to the control terminals of thedriving transistor 138, an electric current flows in the organic ELelement 134 connected between the power supply line 148 and the commonline 146. The intensity of light emitted by the organic EL element 134is controlled by a drain current in the driving transistor 138.

1-3. Structure of the Pixel

FIG. 4 shows an example of planar structure of the pixel 110 acorresponding to the equivalent circuit shown in FIG. 3. FIG. 5A shows across-sectional structure of the pixel 110 a taken along line A1-A2shown in FIG. 4. FIG. 5B shows a cross-sectional structure of the pixel110 a taken along line B1-B2 shown in FIG. 4. FIG. 5B shows across-sectional structure of the selection transistor 136 and thecapacitance element 140. FIG. 5A shows a cross-sectional structure ofthe driving transistor 138 and the organic EL element 134. In thefollowing description, FIG. 4, FIG. 5A and FIG. 5B will be referred to,as necessary. In the plan view of the pixel 110 a shown in FIG. 4, thefirst sensor electrode 114, the second sensor electrode 116 and theorganic EL element 134 are omitted.

As shown in FIG. 4, the pixel 110 a includes the driving transistor 138,the selection transistor 136 and the capacitance element 140. In thepixel 110 a, the gate signal line 142 a, the data signal line 144 andthe common line 146 connected with these components are located.

As shown in FIG. 5A and FIG. 5B, the first sensor electrode 114 and thesecond sensor electrode 116 are embedded in the transparent resinsubstrate 124. The first sensor electrode 114 and the second sensorelectrode 116 form the touch sensor 108. The driving transistor 138, theselection transistor 136, the capacitance element 140 and the organic ELelement 134 are provided on the transparent resin substrate 124. Theshield electrode 126 is located between the first sensor electrode114/the second sensor electrode 116, and the driving transistor 138/theselection transistor 136/the capacitance element 140/the organic ELelement 134.

The second sensor electrode 116 have an opening 119 in a regionoverlapping the first gate electrode 154. The second sensor electrode116 as the transmitter electrode (Tx electrode) is supplied with acommon driving signal (Vcom). Only a third transparent resin layer 150 cis provided between the second sensor electrode 116 and the first gateelectrode 154, and thus the second sensor electrode 116 and the firstgate electrode 154 are located relatively close to each other. In thiscase, when a driving signal is applied to the second sensor electrode116 while the first gate electrode 154 is in a floating state, anelectric field is generated by the driving signal and may act on thefirst gate electrode 154 to destabilize the operation of the drivingtransistor 138. As a result, the driving transistor 138 may malfunction.It is preferred that a fourth transparent resin layer 150 d is madethick in order to put the first gate electrode 154 far from the secondsensor electrode 116. For example, the fourth transparent resin layer150 d may have a thickness of 10 μm or greater, preferably 15 μm orgreater. It is further preferred that the second sensor electrode 116has the opening 119. The opening 119 formed in the second sensorelectrode 116 prevents the common driving signal (Vcom) from influencingthe first gate electrode 154.

In the meantime, in a region where the selection transistor 136 islocated, it is preferred that the second sensor electrode 116 covers thefirst gate electrode 156. The first gate electrode 156 is supplied witha scanning signal from the gate signal line 142 a. The scanning signalapplied to the first gate electrode 156 is at least a two-level signalvoltage having a voltage that turns on the selection transistor 136 anda voltage that turns off the selection transistor 136. The second sensorelectrode 116 is located as overlapping the first gate electrode 156,and as a result, shields the electric field generated by the signalvoltage. With such a structure, the signal voltage applied to the firstgate electrode 156 is prevented from acting on the first sensorelectrode 114. This stabilizes the operation of the touch sensor 108 andprevents the touch sensor from malfunctioning.

1-3-1. Transparent Resin Substrate

The transparent resin substrate 124 has a structure in which a pluralityof transparent resin layers 150 are stacked. The first sensor electrode114 and the second sensor electrode 116 are held between the pluralityof transparent resin layers 150. For example, as shown in FIG. 5A andFIG. 5B, the first sensor electrode 114 is provided between a firsttransparent resin layer 150 a and a second transparent resin layer 150b. The second sensor electrode 116 is provided between the secondtransparent resin layer 150 b and the third transparent resin layer 150c. In this manner, the transparent resin substrate 124 includes theplurality of transparent resin layers 150, so that the first sensorelectrode 114 and the second sensor electrode 116 are embedded in thetransparent resin substrate 124.

The transparent resin substrate 124 further includes the shieldelectrode 126 provided on a top surface of the third transparent resinlayer 150 c. The shield electrode 126 is provided to spread insubstantially the entirety of the pixel 110 a in a planar direction. Inthis embodiment, the shield electrode 126 has a first opening 152 a in aregion overlapping the driving transistor 138 and a second opening 152 bin a region overlapping the selection transistor 136. The shieldelectrode 126 is supplied with a certain potential. For example, theshield electrode 126 is supplied with the ground potential. The firstopening 152 a and the second opening 152 b provided in the shieldelectrode 126 prevent the potential of the shield electrode 126 fromacting directly on the gates of the transistors.

The shield electrode 126 is light-transmissive. The shield electrode 126is formed of, for example, a transparent conductive film. Thetransparent conductive film may be formed of a conductive metal oxidesuch as indium tin oxide (ITO), zinc oxide (ZnO), indium zinc oxide(IZO), tin oxide (SnO₂) or the like; a transparent conductive film of,for example, a metal nitride or a metal oxide nitride such as titaniumnitride (TiN_(x)), titanium oxynitride (TiON) or the like; or aconductive organic material such as polyaniline, graphene or the like.Alternatively, the shield electrode 126 may be formed of a metalmaterial such as aluminum, titanium, copper or the like and may have anopening in positional correspondence with the pixel 110 a such thatlight is transmitted through the opening.

A fourth transparent resin layer 150 d is provided on the shieldelectrode 126. The fourth transparent resin layer 150 d forms aninsulating surface of the transparent resin substrate 124. It ispreferred that the fourth transparent resin layer 150 d has a flatsurface because components such as transistors and the like that areincluded in the pixel 110 a are provided on the fourth transparent resinlayer 150 d.

The transparent resin substrate 124 is formed of a resin material andthus is flexible. Usable as the resin material are, for example, atransparent polyimide resin, a transparent polyethylenenaphthalateresin, a transparent para-polyamide resin, or the like. In the casewhere a transparent polyimide resin or a transparentpolyethylenenaphthalate resin is used, a gas barrier film formed ofsilicon nitride or the like may further be provided because these resinsare inferior to glass in gas barrier property. By contrast, atransparent para-polyamide resin is high in transparency, heatresistance and gas barrier property, and thus is preferably usable forthe transparent resin layers 150. The first transparent resin layer 150a, the second transparent resin layer 150 b, the third transparent resinlayer 150 c and the fourth transparent resin layer 150 d may be formedof the same resin material as each other, at least a part of the layersmay be formed of a different resin material, or all the layers may beformed of different resin materials from each other. Since the pluralityof transparent resin layers are included in the transparent resinsubstrate 124, the electrodes of the touch sensor 108 may be provided inthe transparent resin substrate 124.

It is preferred that the transparent resin substrate 124 has a heatresistance against a temperature of 150° C. to 400° C. In the casewhere, for example, the highest process temperature (heatingtemperature) at which the pixel 110a is formed is 250° C. or lower, apara-polyamide resin is usable as the resin material. Use of thepara-polyamide resin improves the gas barrier property of thetransparent resin substrate 124. In the case where, for example, thehighest process temperature (heating temperature) at which the pixel110a is formed is more than 250° C., it is preferred to use atransparent polyimide resin from the point of view of heat resistance.

Cellulose nanofiber (CNF) may be mixed with a transparent polyimideresin or a transparent para-polyamide resin. Mixture of the cellulosenanofiber (CNF) with the transparent polyimide resin or the transparentpara-polyamide resin provides advantages of improving the rigidity andsuppressing the contraction to improve the size stability. In order toprovide such advantages, the cellulose nanofiber (CNF) may be containedin any of the first transparent resin layer 150 a, the secondtransparent resin layer 150 b, the third transparent resin layer 150 cand the fourth transparent resin layer 150 d. It is preferred that themixing ratio of the cellulose nanofiber (CNF) is 1% by weight to 10% byweight.

It is preferred that the first transparent resin layer 150 a, the secondtransparent resin layer 150 b, the third transparent resin layer 150 cand the fourth transparent resin layer 150 d each have a thickness of 3μm to 10 μm in order to realize a function of a structure that maintainsthe shape of the transparent resin substrate 124 and a function of aflattening film that embeds the first sensor electrode 114 and thesecond sensor electrode 116.

As described above, the touch panel display 100 in this embodimentincludes the touch sensor 108 embedded in the transparent resinsubstrate 124, and thus is decreased in thickness and weight.

FIG. 6 is a plan view showing the positional arrangement of the firstsensor electrodes 114 and the second sensor electrodes 116 included inthe touch sensor 108. The first sensor electrodes 114 are of a flatplate-like (strip-like) conductive pattern extending in the Y direction.The second sensor electrodes 116 are of a flat plate-like (strip-like)conductive pattern extending in the X direction. The plurality of firstsensor electrodes 114 are arrayed in the X direction, and the pluralityof second sensor electrodes 116 are arrayed in the Y direction. Theplurality of first sensor electrodes 114 and the plurality of secondsensor electrodes 116 are located as crossing each other with the secondtransparent resin layer 150 b being located between the plurality offirst sensor electrodes 114 and the plurality of second sensorelectrodes 116. The first sensor electrodes 114 and the second sensorelectrodes 116 are located at a plane through which the light emittedfrom the pixels 110 a is output, and therefore are each formed of atransparent conductive film. The first sensor electrodes 114 and thesecond sensor electrodes 116 are provided with the second transparentresin layer 150 b being located between the first sensor electrodes 114and the second sensor electrodes 116. The second transparent resin layer150 b acts as a dielectric film, so that an electrostatic capacitance isformed between the first sensor electrodes 114 and the second sensorelectrodes 116.

The first sensor electrodes 114 are each supplied with a detectionsignal (Vdet) and used as a receiver electrode (Rx electrode). Thesecond sensor electrodes 116 are each supplied with a common drivingsignal (Vcom) and used as a transmitter electrode (Tx electrode). In thetransparent resin substrate 124, the first sensor electrodes 114 and thesecond sensor electrodes 116 form the touch sensor 108. The touch sensor108 has the electrostatic capacitance thereof changed when a finger of ahuman or the like touches or approaches the touch sensor 108. The touchsensor 108 using such a characteristic is formed in the transparentresin substrate 124.

The first sensor electrodes 114 and the second sensor electrodes 116 arelocated in a part of, or in the entirety of, the display portion 102.The first sensor electrodes 114 and the second sensor electrodes 116 arelight-transmissive. The first sensor electrodes 114 and the secondsensor electrodes 116 are each formed of, for example, a transparentconductive film. The transparent conductive film may be formed of aconductive metal oxide such as indium tin oxide (ITO), zinc oxide (ZnO),indium zinc oxide (IZO), tin oxide (SnO₂) or the like; a transparentconductive film of, for example, a metal nitride or a metal oxidenitride such as titanium nitride (TiN_(x)), titanium oxynitride (TiON)or the like; or a conductive organic material such as polyaniline,graphene or the like. Alternatively, the first sensor electrodes 114 andthe second sensor electrodes 116 may be formed of a metal material suchas aluminum, titanium, copper or the like and each have an opening inpositional correspondence with the pixel 110 a such that light istransmitted through the opening.

The plurality of first sensor electrodes 114 and the plurality of secondsensor electrodes 116 may be provided in any number. The first sensorelectrodes 114 and the second sensor electrodes 116 merely need todistinguish, for example, a range in which a finger of a human touchesthe first sensor electrodes 114 and the second sensor electrodes 116.Therefore, the first sensor electrodes 114 and the second sensorelectrodes 116 are provided in a number significantly smaller than thenumber of the pixels 110 a. In the case where, for example, the displayportion 102 has an area size (screen size) of 5 inches, the diagonalline of the display portion 102 has a length of 125 mm. In this case,for example, 1080×1920 pixels 110 a may be provided. The number of thefirst sensor electrodes 114 may be 12 (pitch: 5 mm; electrode width: 1.0mm to 1.5 mm) or 25 (pitch: 2.5 mm: electrode width: 0.5 mm to 0.7 mm).The number of the second sensor electrodes 116 may be 22 (pitch: 5 mm;electrode width: 4.9 mm) or 45 (pitch: 2.5mm; electrode width: 2.4 mm).

1-3-2. Structure of the Circuit Elements

As shown in FIG. 5A and FIG. 5B, the driving transistor 138, theselection transistor 136, the capacitance element 140 and the organic ELelement 134 are provided on the transparent resin substrate 124. In thisembodiment, the driving transistor 138 and the selection transistor 136each have a dual-gate structure, and the organic EL element 134 has aso-called inverse stack structure, in which organic electroluminescencelayers are stacked from the cathode electrode side.

1-3-2-1. Driving Transistor

The driving transistor 138 has a structure in which the first gateelectrode 154, a first insulating layer 158, a first oxide semiconductorlayer 162 a, a second insulating layer 154, and the second gateelectrode 166 are stacked. The first gate electrode 154 is located tooverlap the first oxide semiconductor layer 162 a with the firstinsulating layer 158 being located between the first gate electrode 154and the first oxide semiconductor layer 162 a. The second gate electrode116 is located to overlap the first oxide semiconductor layer 162 a withthe second insulating layer 164 being located between the second gateelectrode 166 and the first oxide semiconductor layer 162 a. The firstgate electrode 154, the second gate electrode 166 and the first oxidesemiconductor layer 162 a have a common overlapping region. The drivingtransistor 138 includes a channel region where the first oxidesemiconductor layer 162 a overlaps the first gate electrode 154 and thesecond gate electrode 166. The first gate electrode 154 is located inthe opening 152 a, and is embedded by the fourth transparent resin layer150 d. The second gate electrode 166 is located on the second insulatinglayer 164 (on the side opposite to the transparent resin substrate 124).

A first transparent conductive layer 160 a and a second transparentconductive layer 160 b are located between the first insulating layer158 and the first oxide semiconductor layer 162 a. As seen in a planview, the first transparent conductive layer 160 a and the secondtransparent conductive layer 160 b are located to hold the first gateelectrode 154 and the second gate electrode 166 from both of two sidesin a horizontal direction. The first transparent conductive layer 160 aand the second transparent conductive layer 160 b may be located suchthat tip portions thereof overlap the first gate electrode 154 and thesecond gate electrode 166. The first transparent conductive layer 160 aand the second transparent conductive layer 160 b are located to contactthe first oxide semiconductor layer 162 a. The driving transistor 138includes a drain region where the first transparent conductive layer 160a is in contact with the first oxide semiconductor layer 162 a, andincludes a source region where the second transparent conductive layer160 b is in contact with the first oxide semiconductor layer 162 a.

The first oxide semiconductor layer 162 a is formed of a metal oxidematerial. The metal oxide material may be a four-component oxidematerial, a three-component oxide material, a two-component oxidematerial or a one-component oxide material. Such metal oxide materialsmay be in an amorphous state, a crystalline state, or a mixed state ofthe amorphous state and the crystalline state.

Examples of the four-component oxide material include anIn₂O₃—Ga₂O₃—SnO₂—ZnO-based oxide material. Examples of thethree-component oxide material include an In₂O₃—Ga₂O₃—SnO₂-based oxidematerial, an In₂O₃—Ga₂O₃—ZnO-based oxide material, anIn₂O₃—SnO₂—ZnO-based oxide material, an In₂O₃—Al₂O₃—ZnO-based oxidematerial, a Ga₂O₃—SnO₂—ZnO-based oxide material, a Ga₂O₃—Al₂O₃—ZnO-basedoxide material, an SnO₂—Al₂O₃—ZnO-based oxide material. Examples of thetwo-component oxide material include an In₂O₃—ZnO-based oxide material,an SnO₂—ZnO-based oxide material, an Al₂O₃—ZnO-based oxide material, anMgO—ZnO-based oxide material, an SnO₂—MgO-based oxide material, and anIn₂O₃—MgO-based oxide material. Examples of the one-component oxidematerial include an In₂O₃-based oxide material, an SnO₂-based oxidematerial, and a ZnO-based oxide material. The above-described oxidesemiconductors may each contain silicon (Si), nickel (Ni), tungsten (W),hafnium (Hf) or titanium (Ti). For example, the In—Ga—Zn—O-based oxidematerial identified above is an oxide material containing at least In,Ga and Zn with no specific limitation on the composition ratio. In otherwords, the oxide semiconductor layer 162 may be a thin film representedby chemical formula InMO₃(ZnO)_(m) (m>0). In the chemical formula, M isone or a plurality of metal elements selected from Ga, Al, Mg, Ti, Ta,W, Hf and Si. The four-component oxide material, the three-componentoxide material, the two-component oxide material, and the one-componentoxide material described above are not limited to containing an oxidehaving a stoichiometric composition, and may be an oxide material havinga composition shifted from the stoichiometric composition. Such a metaloxide semiconductor material has a bandgap of 3.0 eV or larger and isvisible light-transmissive.

The first transparent conductive layer 160 a and a second transparentconductive layer 160 b are formed of a conductive metal oxide material,a conductive metal nitride material or a conductive metal oxide nitridematerial. Examples of the metal oxide material include indium tin oxide(ITO), zinc oxide (ZnO), indium zinc oxide (IZO), tin oxide (SnO₂),niobium-containing titanium oxide (TiNbO_(x)), and the like. Such ametal oxide material may form a good ohmic contact with the oxidesemiconductor layer 162. A transparent and conductive metal nitride or atransparent and conductive metal oxide nitride such as titanium nitride(TiN_(x)), titanium oxynitride (TiON) or the like is also usable.

As shown in FIG. 5A, the driving transistor 138 is electricallyconnected with the second common line 146 b. The first oxidesemiconductor layer 162 a and the second transparent conductive layer160 b extend to a region where the third common line 146 c is located,and are electrically connected with the third common line 146 c. Thefirst oxide semiconductor layer 162 a is above, and contacts, the thirdcommon line 146 c, whereas the second transparent conductive layer 160 bis below, and contacts, the third common line 146 c. The second commonline 146 b is provided in contact with the shield electrode 126, and issupplied with the same potential as that of the shield electrode 126.The third common line 146 c is electrically connected with the secondcommon line 146 b via a contact hole 153 a provided in the firstinsulating layer 158 and the fourth transparent resin layer 150 d. Asshown in FIG. 4, in a planar layout, the third common line 146 c iselectrically connected with the second common line 146 b extending inthe first direction (the Y direction shown in FIG. 4). The first commonline 146 a, the second common line 146 b and the third common line 146 care formed of a metal material such as titanium, aluminum, molybdenum,copper or the like.

The first insulating layer 158 has a structure in which a first siliconnitride film 174 a and a first silicon oxide film 176 a are stacked fromthe side of the first gate electrode 154. The second insulating layer164 has a structure in which, for example, a second silicon oxide film176 b and a second silicon nitride film 174 b are stacked from the sideof the first oxide semiconductor layer 162 a. The first oxidesemiconductor layer 162 a is provided in contact with the first siliconoxide film 176 a and the second silicon oxide film 176 b. The firstoxide semiconductor layer 162 a is provided in contact with thesesilicon oxide films, and thus is expected to suppress generation ofoxygen deficiency. It is preferred that the first silicon oxide film 176a and the second silicon oxide film 176 b provided in contact with achannel region of the first oxide semiconductor layer 162 a have nooxygen deficiency and contain an excessive amount of oxygen. The firstsilicon oxide film 176 a and the second silicon oxide film 176 b, whencontaining an excessive amount of oxygen, may each be an oxygen supplysource for the first oxide semiconductor layer 162 a. The “silicon oxidefilm containing an excessive amount of oxygen” encompasses a filmcontaining a larger amount of oxygen than the stoichiometriccomposition. The silicon oxide film containing an excessive amount ofoxygen may contain an excessive amount of oxygen in a lattice. The firstinsulating layer 158 and the second insulating layer 164 may contain asilicon oxide nitride film or an aluminum oxide film instead of thesilicon oxide film.

The first gate electrode 154 and the second gate electrode 166 areformed of a metal material such as aluminum (Al), molybdenum (Mo),tungsten (W), zirconium (Zr), copper (Cu) or the like. Example ofaluminum alloy include an aluminum-neodymium alloy (Al—Nd), analuminum-neodymium-nickel alloy (Al-Nd-Ni), an aluminum-carbon-nickelalloy (Al—C—Ni), a copper-nickel alloy (Cu-Ni), and the like. Forexample, the first gate electrode 154 and the second gate electrode 166may each be formed of a film of aluminum or a molybdenum-tungsten (MoW)alloy or the like. The first gate electrode 154 may include a first gateelectrode layer 154 a formed of the same transparent conductive film asthat of the shield electrode 126 and a first gate electrode layer 154 bformed of any of the above-described metal films.

The driving transistor 138 is covered with a flattening layer 172. Theflattening layer 172 is formed of, for example, an organic resinmaterial such as an acrylic resin, a polyimide resin, an epoxy resin, apolyamide resin or the like. The flattening layer 172 has a surfacethereof flattened when being coated with a composition containing aprecursor of an organic resin material during the manufacturing of thetouch panel display 100, by the leveling action of the coating film.Alternatively, the flattening film 172 may be formed of an inorganicinsulating film such as a silicon oxide film, a silicon nitride film orthe like.

The driving transistor 138 in this embodiment has a dual-gate structurein which the first oxide semiconductor layer 162 a is held between thetwo gate electrodes (the first gate electrode 154 and the second gateelectrode 166). It is preferred that the first gate electrode 154 andthe second gate electrode 166 are electrically connected with each otherand are of the same potential. With such an arrangement, the drivingtransistor 138 has a current driving capability thereof improved, andthus provides a sufficient level of current to drive the organic ELelement 134. For example, even if the operation point of the organicelement 134 is fluctuated, the driving transistor 138 may performconstant current driving in accordance with the fluctuation in theoperation point.

1-3-2-2. Selection Transistor

The selection transistor 136 has a structure in which the first gateelectrode 156, the first insulating layer 158, a second oxidesemiconductor layer 162 b, the second insulating layer 164, and thesecond gate electrode 168 are stacked. The selection transistor 136includes a channel region where the second oxide semiconductor layer 162b overlaps the first gate electrode 156 and the second gate electrode168. The first gate electrode 156 is located in the opening 152 b of theshield electrode 126. The first gate electrode 156 may have a structurein which, in the second opening 152 b, a first gate electrode layer 156a formed of the same transparent conductive film as that of the shieldelectrode 126 and a first gate electrode layer 156 b formed of a metalfilm are stacked on each other. A third transparent conductive layer 160c and a fourth transparent conductive layer 160 d are provided betweenthe first insulating layer 158 and the second oxide semiconductor layer162 b. The third transparent conductive layer 160 c and the fourthtransparent conductive layer 160 d are provided in contact with thesecond oxide semiconductor layer 162 b, and thus act as a source regionand a drain region respectively. As seen in a plan view, the thirdtransparent conductive layer 160 c and the fourth transparent conductivelayer 160 d are provided to hold the first gate electrode 156 and thesecond gate electrode 168 from both of two sides in the horizontaldirection.

The third transparent conductive layer 160 c is electrically connectedwith the data signal line 144. The data signal line 144 is in directcontact with a top surface of the third transparent conductive layer 160c. The second oxide semiconductor layer 162 b is provided to extend to aregion where the data signal line 144 is provided and to cover the datasignal line 144. The data signal line 144 is in direct contact with thethird transparent conductive layer 160 c, and thus has a larger contactarea size, and a lower contact resistance, than in the case where thedata signal line 144 is connected with the third transparent conductivelayer 160 c via a contact hole. The data signal line 144 has the topsurface and a side surface be covered with the second oxidesemiconductor layer 162 b, and thus is not exposed to an oxidizingatmosphere or a reducing atmosphere during the manufacturing of thetouch panel display 100. Therefore, the data signal line 144 is capableof suppressing the surface thereof from having a high resistance.

The fourth transparent conductive layer 160 d is electrically connectedwith a drain electrode 169. The second oxide semiconductor layer 162 bis provided on a top surface of the fourth transparent conductive layer160 d to cover the drain electrode 169. The drain electrode 169 iselectrically connected with the second gate electrode 166 of the drivingtransistor 138. The selection transistor 136 has a dual-gate structurein which the second oxide semiconductor layer 162 b is held between thefirst gate electrode 156 and the second gate electrode 168. Thisimproves the switching characteristics of, and decreases the off-currentof, the selection transistor 136.

1-3-2-3. Capacitance Element

As shown in FIG. 5B, the capacitance element 140 has a structure inwhich a first capacitance electrode 170 a, the first insulating layer158 and a second capacitance electrode 170 b are stacked. The firstcapacitance element 170 a is formed in a region where the fourthtransparent conductive layer 160 d and the second oxide semiconductorlayer 162 b are extended to be outer to the drain electrode 169. Thefirst capacitance element 170 a has a structure in which the fourthtransparent conductive layer 160 d and the second oxide semiconductorlayer 160 b are stacked on each other. The first capacitance element 170a is electrically connected with the drain of the selection transistor136. The second first capacitance element 170 b is formed in the samelayer as that of the second gate electrode 168, and is electricallyconnected with the first common line 146 a via a contact hole 153 bprovided in the first insulating layer 158 and the fourth transparentresin layer 150 d.

1-3-2-4. Organic EL Element

As shown in FIG. 5A, the organic EL element 134 has a structure in whicha first electrode 180 corresponding to a cathode electrode, an electrontransfer layer 182, an electron injection layer 184, a light emittinglayer 186, a hole transfer layer 188, a hole injection layer 190, and asecond electrode 192 corresponding to an anode electrode are stackedfrom the side of the transparent resin substrate 124.

In a region where the organic EL element 134 is provided, the flatteninglayer 172 and the second insulating layer 164 has an opening 178. Thefirst electrode 180 as the cathode electrode of the organic EL element134 is located as overlapping the opening 178. The opening 178 exposes atop surface of the electron transfer layer 182 located on the firstelectrode 180. The electron injection layer 184, the light emittinglayer 186, the hole transfer layer 188, the hole injection layer 190 andthe second electrode 192 as the anode electrode are stacked on theelectron transfer layer 182 in positional correspondence with theopening 178. A region where these stacked layers and the first electrode180 overlap each other is a light emitting region of the organic ELelement 134. Hereinafter, each of the layers included in the organic ELelement 134 will be described in detail.

1-3-2-4-1. Cathode Electrode

The first electrode 180 acting as the cathode electrode is formed of atransparent conductive film. Specifically, the first transparentconductive layer 160 is extended to the region of the organic EL element134 to form the first electrode 180. The first transparent conductivelayer 160 a and the first electrode 180 are formed of one continuousconductive film, so that the driving transistor 138 and the organic ELelement 134 are electrically connected with each other. The organic ELelement 134 and the driving transistor 138 are directly connected witheach other, not via a contact hole. Such an arrangement simplifies thestructure of the pixel 110 a.

The first electrode 180 acting as the cathode electrode is formed of thesame conductive film as that of the first transparent conductive layer160 a. The first transparent conductive layer 160 a is formed of aconductive metal oxide material, a conductive metal nitride material ora conductive metal oxide nitride material. A conductive film formed ofsuch a material has a bandgap of 2.8 eV or larger, preferably 3.0 eV orlarger, and thus transmits substantially all the light of a visiblerange. Therefore, the first electrode 180 is usable as an electrode ofthe organic EL element 134 on the light output side.

On the first electrode 180, the first oxide semiconductor layer 162 amay be provided as extending from the driving transistor 138. The firstoxide semiconductor layer 162 a has a bandgap of 3.0 eV or larger andthus is visible light-transmissive. As described below, the electrontransfer layer 182 is formed of a metal oxide. Therefore, the firstoxide semiconductor layer 162 a, which is formed of the same material orthe same type of material as that of the electron transfer layer 182, isprovided between the first electrode 180 acting as the cathode electrodeand the electron transfer layer 182, so that formation of an electroninjection barrier is prevented. In other words, the first oxidesemiconductor layer 162 a extending from the channel region of thedriving transistor 138 is usable as a part of the electron transferlayer 182, which is in contact with the first electrode 180.

1-3-2-4-2. Electron Transfer Layer

The electron transfer layer 182 is formed of a metal oxide material. Themetal oxide material may be substantially the same four-component oxidematerial, three-component oxide material, two-component oxide materialor one-component oxide material as that of the oxide semiconductor layer162. Such metal oxide materials may be in an amorphous state, acrystalline state, or a mixed state of the amorphous state and thecrystalline state.

For example, the electron transfer layer 182 may be formed to containone or a plurality of substances selected from an indium oxide, a zincoxide, a gallium (Ga) oxide, a tin (Sn) oxide, a magnesium (Mg) oxide, asilicon (Si) oxide, a hafnium (Hf) oxide, a tantalum (Ta) oxide and aniobium (Nb) oxide. These metal oxide materials have a bandgap of 3.0 eVor larger and is visible light-transmissive. It is preferred that theelectron transfer layer 182 has a thickness of 50 nm to 100 nm. Theelectron transfer layer 182 may be as thick as possible, so that theeffect of preventing the short-circuiting between the first electrode180 and the second electrode 192 is improved. The electron transferlayer 182 is formed by sputtering, vacuum vapor deposition, coating orthe like.

It is preferred that the electron transfer layer 182 has a carrierconcentration that is 1/10 or less, preferably 1/100 or less, of that ofthe first oxide semiconductor layer 162 a. In other words, it ispreferred that the first oxide semiconductor layer 162 a has a carrierconcentration, in a region in contact with the electron transfer layer182, that is 10 times or greater, preferably 100 times or greater, thecarrier concentration of the electron transfer layer 182. Specifically,it is preferred that the carrier concentration of the electron transferlayer 182 is 10¹³/cm³ to 10¹⁷/cm³, whereas the carrier concentration ofthe first oxide semiconductor layer 162 a is 10¹⁵/cm³ to 10¹⁹/cm³, andthat the difference in the carrier concentration between the layers isone digit or greater, preferably two digits or greater. The first oxidesemiconductor layer 162 a has a carrier concentration of 10¹⁵/cm³ to10¹⁹/cm³, so that the resistance loss is decreased in the electricalconnection between the driving transistor 138 and the organic EL element134 and thus the driving voltage is suppressed from increasing. If thecarrier concentration of the electron transfer layer 182 is 10²⁰/cm³ orgreater, the excited state in the light emitting layer 186 isdeactivated and thus the light emission efficiency is decreased. Bycontrast, if the carrier concentration of the electron transfer layer182 is 10¹³/cm³ or less, the number of the carriers supplied to thelight emitting light 186 is decreased and thus a sufficient level ofluminance is not provided. As described above, the first oxidesemiconductor layer 162 a extending from the driving transistor 138 isprovided in contact with the light transfer layer 182 and the carrierconcentrations of the layers are made different from each other, so thatthe driving voltage is prevented from increasing and the light emissionefficiency of the organic EL element 134 is increased.

The carrier concentration of the electron transfer layer 182 may becontrolled by controlling the concentration of the oxygen deficiency inan oxide semiconductor film. The oxygen deficiency in the oxidesemiconductor film acts as a donor. When the density of the oxygendeficiency in the oxide semiconductor film is increased, the carrierconcentration is increased, whereas when the density of the oxygendeficiency in the oxide semiconductor film is decreased, the carrierconcentration is decreased. The oxygen deficiency in the oxidesemiconductor film may be increased by, for example, causing hydrogen toact thereon, and may be decreased by supplying oxygen.

1-3-2-4-3. Electron Injection Layer

In the organic EL element 134, the electron injection layer 184 is usedto lower the energy barrier and thus to promote the injection ofelectrons into the electron transfer layer 182 from the cathodeelectrode. It is preferred that the electron injection layer 184 isprovided to make it easier for the electrons to be injected from theelectron transfer layer 182 formed of an oxide semiconductor into thelight emitting layer 186. Therefore, in the organic EL element 134, theelectron injection layer 184 is provided between the electron transferlayer 182 and the light emitting layer 186.

It is desired that the electron injection layer 184 is formed of amaterial having a small work function in order to inject electrons intothe light emitting layer 186. The electron injection layer 184 is formedto contain a calcium (Ca) oxide and an aluminum (Al) oxide. It ispreferred that, for example, C12A7 (12CaO·7Al₂O₃) electride for theelectron injection layer 184. C12A7 electride has semiconductorcharacteristics and is controllable to have any resistance between ahigh resistance and a low resistance. C12A7 electride also has a workfunction of 2.4 eV to 3.2 eV, which is substantially equal to that of analkaline metal material. Therefore, C12A7 electride is preferably usablefor the electron injection layer 184.

The electron injection layer 184 formed of C12A7 electride is formed bysputtering with polycrystalline C12A7 electride being used as a target.Since C12A7 electride has semiconductor characteristic, it is preferredthat the electron injection layer 184 has a thickness of 1 nm to 100 nm.If the thickness of the electron injection layer 184 is less than thisrange, an interface having a small energy barrier cannot be formedbetween the electron injection layer 184 and the light emitting layer186. If the thickness of the electron injection layer 184 is greaterthan this range, the resistance is too high and thus the driving voltageis increased. It is preferred that C12A7 electride has a Ca:Al molarratio of 13:13 to 11:16. Since the electron injection layer 184 isformed by sputtering, it is preferred that C12A7 electride is amorphous.C12A7 electride may be crystalline.

C12A7 electride is stable in the air, and thus has an advantage of beingeasier to handle than an alkaline metal compound conventionally used foran electron injection layer, for example, lithium fluoride (LiF),lithium oxide (Li₂O), sodium chloride (NaCl), potassium chloride (KCl)or the like. With such an advantage, it is made unnecessary to performoperations in dry air or in an inert gas during the formation of theorganic EL element 134, which alleviates the manufacturing conditions.

C12A7 electride has a high ionization potential, and thus is usable fora hole blocking layer when being provided on the side opposite to thehole transfer layer 188 with the light emitting layer 186 being heldbetween the hole blocking layer and the hole transfer layer 188. Namely,the electron injection layer 184 formed of C12A7 electride is providedbetween the electron transfer layer 182 and the light emitting layer186, so that holes injected into the light emitting layer 186 aresuppressed from moving to reach the first electrode 180 acting as thecathode electrode. As a result, the light emission efficiency isimproved.

1-3-2-4-4. Light Emitting Layer

The light emitting layer 186 may be formed of any of various materials.Examples of the material usable for the light emitting layer 186 includea fluorescent compound that emits fluorescence and a phosphorescentcompound that emits phosphorescence. For example, a light emitting layercorresponding to red and a light emitting layer corresponding to greenmay each be formed of a phosphorescent compound, whereas a lightemitting layer corresponding to blue may be formed of a fluorescentcompound. In the case of being formed of a white light emitting layer,the light emitting layer 186 may have a structure in which a blue lightemitting layer and a yellow light emitting layer are stacked on eachother. The light emitting layer 186 may be formed by vapor deposition,transfer, spin-coating, spray-coating, gravure printing or the like. Thelight emitting layer 186 may have an optionally selected thickness, forexample, a thickness in the range of 10 nm to 100 nm.

1-3-2-4-5. Hole Transfer Layer

The hole transfer layer 188 is formed of a material having a holetransfer property. The hole transfer layer 188 may be formed of, forexample, an arylamine-based compound. an amine compound containing acarbazole group, an amine compound containing a fluorene derivative, orthe like. The hole transfer layer 188 is formed by vacuum vapordeposition, coating or the like. The hole transfer layer 188 may beformed by such a method to have a thickness of 10 nm to 500 nm. The holetransfer layer 188 may be omitted.

1-3-2-4-6. Hole Injection Layer

The hole injection layer 190 contains a substance having a high level ofproperty of injecting holes into an organic layer. Examples of substancehaving such a high level of property of injecting holes include a metaloxide such as a molybdenum oxide, a vanadium oxide, a ruthenium oxide, atungsten oxide, a manganese oxide, or the like. Alternatively,phthalocyanine (H₂PC), copper (II) phthalocyanine (CuPC),hexaazatriphenylenehexacarbonnitrile (HAT-(CN)₆) or the like may beused. The hole injection layer 190 of such a material is formed byvacuum vapor deposition, coating or the like. The hole injection layer190 is formed by such a method to have a thickness of 1 nm to 100 nm.

1-3-2-4-7. Anode Electrode

The second electrode 192 acting as the anode electrode is formed of ametal material, an alloy or a conductive compound having a large workfunction (specifically. 4.0 eV or larger). The second electrode 192 isformed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO),indium oxide containing tungsten oxide and zinc oxide (IWZO), or thelike. The second electrode 192 acting as the anode electrode formed ofsuch a conductive metal oxide material is formed by vacuum vapordeposition or sputtering. Since the organic EL element 134 is of abottom emission-type, it is preferred that the second electrode 192acting as the anode electrode is light-reflective or has alight-reflecting surface. Since a film of a conductive metal oxide suchas indium tin oxide (ITO), indium zinc oxide (IZO) or the like islight-transmissive, a metal film of aluminum (Al), silver (Ag) or thelike may be stacked on a surface of the second electrode 192 that isopposite to the hole injection layer 190. Although being omitted in FIG.4, FIG. 5A and FIG. 5B, a passivation layer blocking the transmission ofoxygen (O₂) or moisture (H₂O) may be provided on the second electrode192.

As described above, the pixel 110 a in this embodiment has a structurein which the driving transistor 138 having an n-channel conductivity andthe organic EL element 134 are electrically connected with each other.The organic EL element 134 are of a bottom emission-type, and emittedlight toward the shield electrode 126. The electron transfer layer 182and the electron injection layer 184, which are lower layers of theorganic EL element 134, are formed of an inorganic insulating material.Therefore, the organic EL element 134 suppresses the characteristicsthereof from being deteriorated and stabilizes the characteristicsthereof.

1-4. Structure of the Touch Sensor

As described above with reference to FIG. 6, the first sensor electrodes114 and the second sensor electrodes 116 are located to cross each otherso as to form a matrix. FIG. 7 shows a structure of the touch sensor 108and the driving circuit 112 located as overlapping the display portion102.

FIG. 7 shows the touch sensor 108 including the first sensor electrodes114 and the second sensor electrodes 116, and the first driving circuit112 a, the second driving circuit 112 b and the third driving circuit112 c located outer to the touch sensor 108. The first driving circuit112 a has a function of sequentially selecting scanning signal lineslocated in the display portion 102 and outputting the scanning signals.The third driving circuit 112 c is a scanning circuit for the touchsensor 108, and has a function of sequentially selecting the secondsensor electrodes 116 and outputting the common driving signals (Vcom).The first driving circuit 112 a and the third driving circuit 112 c eachinclude a sequential logic circuit such as a shift register or the like.

By contrast, the second driving circuit 112 b includes circuit blockshaving different functions form each other. The circuit blocks include atouch sensor sensing circuit block 117 a, a touch sensor scanningcircuit block 117 b, a scanning signal line driving circuit block 117 c,and a video signal line driving circuit block 117 d. It is preferredthat the second driving circuit 112 b including these circuit blocks 117is realized by one semiconductor chip (integrated circuit). FIG. 7 showsa form in which the second driving circuit 112 b including the pluralityof circuit blocks is realized by one bare chip and is mounted on theflexible printed circuit board 122 by COF (Chip on Film). Onesemiconductor chip is provided to have such a plurality of functions inthis manner, so that the cost for mounting is decreased.

In the second driving circuit 112 b, the touch sensor sensing circuitblock 117 a is connected with the first sensor electrodes 114. The touchsensor sensing circuit block 117 a has a function of sequentiallyoutputting sensing signals (Vdet) to the first sensor electrodes 114.The touch sensor scanning circuit block 117 b has a function ofoutputting a timing signal and the common driving signal (Vcom) to thethird driving circuit 112 c. The scanning signal line driving circuitblock 117 c has a function of outputting a timing signal, synchronizedto a video signal, to the first driving circuit 112 a. The video signalline driving circuit block 117 d is connected with video signal lineslocated in the display portion 102, and has a function of outputting avideo signal to the video signal lines.

FIG. 8 shows a form in which the first driving circuit 112 a and thethird driving circuit 112 c are located on both of two sides of thedisplay portion 102. In this circuit layout, the scanning signal lines(not shown) located in the display portion 102 are supplied with thesame scanning signal from both of the two sides, and the second sensorelectrodes 116 are supplied with the same common driving signal (Vcom)from both of the two sides. With such a circuit layout, even in the caseof having a large load capacitance, the scanning signal lines and thesecond sensor electrodes 116 may be driven at high speed. In the seconddriving circuit 112 b, the touch sensor sensing circuit block 117 a, thetouch sensor scanning circuit block 117 b, the scanning signal linedriving circuit block 117 c and the video signal line driving circuitblock 117 d are integrated into one semiconductor chip (integratedcircuit). Such an arrangement decreases the number of steps of mountingthe semiconductor chip (integrated circuit) on the flexible printedcircuit board 122 as compared with the case where the circuit blocks arerealized by individual semiconductor chips (integrated circuits).

In the case where a semiconductor chip (integrated circuit) thatcontrols the touch sensor 108 and a semiconductor chip (integratedcircuit) that drives the display portion 102 are realized by individualsemiconductor chips, these two semiconductor chips need to be mounted.In this case, the same mounting steps are repeated twice, whichdecreases the productivity. By contrast, in this embodiment, only onemounting step is needed. This improves the manufacturing yield anddecreases the manufacturing cost.

In the example shown in FIG. 7, the second driving circuit 112 b isrealized by one semiconductor chip. The present invention is not limitedto this, and the circuit blocks may be realized by individualsemiconductor chips.

FIG. 9 schematically shows a cross-sectional structure of the touchpanel display 100. The touch panel display 100 includes the transparentresin substrate 124 including the first sensor electrodes 114, thesecond sensor electrodes 116 and the shield electrode 126, and alsoincludes the terminal portion 106, a circuit element layer 149, theorganic EL elements 134, and the sealing layer 128 provided on thetransparent resin substrate 124. The circuit element layer 149 includescircuit elements such as the driving transistor 138, the selectiontransistor 136, the capacitance element 140, and the like.

In the terminal portion 106, terminal electrodes 118 a and 118 b areformed in the same layer as that of the circuit element layer 149.Namely, the terminal electrodes 118 a and 118 b are provided on thefourth transparent resin layer 150 d. In this case, the first sensorelectrodes 114 are each connected with the terminal electrode 118 b viaa contact hole running through the fourth transparent resin layer 150 d,the third transparent resin layer 150 c and the second transparent resinlayer 150 b. The second sensor electrodes 116 are each connected withthe terminal electrode 118 a via a contact hole running through thefourth transparent resin layer 150 d and the third transparent resinlayer 150 c. The terminal electrodes 118 a and 118 b are electricallyconnected with the flexible printed circuit board 122, on which thesecond driving circuit 112 b is mounted. In this manner, the terminalelectrodes located in the same layer and the sensor electrodes areconnected with each other via contact holes having different depths, sothat the terminal portion 106 has a high density.

In this embodiment, the sensor electrodes 114 and 116 forming the touchsensor 108 are embedded in the transparent resin substrate 124, so thatthe touch panel display 100 is thinned and is made flexible.

1-5. Method for Manufacturing the Touch Panel Display

An example of method for manufacturing the touch panel display 100 in anembodiment according to the present invention will be described withreference to the drawings. Hereinafter, the manufacturing method in thisembodiment will be described by way of the structures of variousmanufacturing steps corresponding to the structure of the pixel 110 ashown in FIG. 5A and FIG. 5B.

FIG. 10A and FIG. 10B show a stage of forming the transparent resinsubstrate 124. For manufacturing the touch panel display 100 in thisembodiment, a support substrate 200 is used. The support substrate 200may be a plate-like glass substrate having a first surface and a secondsurface opposite to the first surface. It is desired that the glasssubstrate has a high level of heat resistance. It is preferred that, forexample, an alkali-free glass substrate having a strain point of 500°C., preferably 550° C. is used.

The first transparent resin layer 150 a is formed on the first surfaceof the support substrate 200. The first transparent resin layer 150 a isformed of an insulating resin material. Examples of the insulating resinmaterial include a transparent polyimide resin, a transparentpolyethylenenaphthalate resin, a transparent para-polyamide resin, andthe like. In the case where the transparent polyimide resin is used, thefirst transparent resin layer 150 a is formed as follows, for example.Diamine and acid anhydride are polymerized in the presence of a solventto form a polyimide precursor resin. Then, the polyimide precursor resinis applied to the first surface of the support substrate 200 and isimidized by heat treatment. As a result, the first transparent resinlayer 150 a is formed. In the case where the transparent para-polyamideresin is used, the first transparent resin layer 150 a is formed asfollows. The transparent para-polyamide resin is copolymerized to have abetter solubility in an organic solvent. The resultant transparentpara-polyamide resin is applied to the first surface of the supportsubstrate 200, and is heat-treated to vaporize the solvent and thus iscured. As a result, the first transparent resin layer 150 a is formed.The first transparent resin layer 150 a is formed to have a thickness of3 μm to 30 μm.

The first sensor electrodes 114 are formed on the first transparentresin layer 150 a. The first sensor electrodes 114 are formed of atransparent conductive film. The transparent conductive film is formedof a conductive metal oxide such as indium tin oxide (ITO), zinc oxide(ZnO), indium zinc oxide (IZO), tin oxide (SnO₂), niobium-containingtitanium oxide (TiNbO_(x)), or the like; a conductive transparent filmof a metal nitride or a metal oxide nitride such as titanium nitride(TiN_(x)), titanium oxynitride (TiON) or the like; a metal nanowire ofsilver (Ag) or the like; or a conductive organic material such aspolyaniline, graphene, carbon nanotube or the like. The first sensorelectrodes 114 are formed as follows. The transparent conductive film isformed on the entirety of a first surface of the first transparent resinlayer 150 a. Then, a resist mask is formed by lithography and etching isperformed, so that the first sensor electrodes 114 are formed. Thetransparent conductive film formed on the first transparent resin layer150 a is patterned to be, for example, flat plate-like (strip-like) asshown in FIG. 6. Alternatively, the first sensor electrodes 114 may beformed of a metal film and patterned to be meshed with through-holesbeing located in positional correspondence with the pixels 110 a asdescribed in another embodiment. The first sensor electrodes 114 areformed to have a thickness of 50 nm to 1000 nm.

The second transparent resin layer 150 b is formed on the first sensorelectrodes 114. The second transparent resin layer 150 b is formed insubstantially the same manner as that of the first transparent resinlayer 150 a. It is preferred that the second transparent resin layer 150b is formed to embed the steps caused by the pattern of the first sensorelectrodes 114 and thus to provide a flat surface. The second sensorelectrodes 116 are formed on the second transparent resin layer 150 b.The second sensor electrodes 116 are formed in substantially the samemanner as that of the first sensor electrodes 114. The second sensorelectrodes 116 are formed to be patterned to be, for example, flatplate-like (strip-like) as shown in FIG. 6. In the second sensorelectrodes 116, an opening 119 is formed in positional correspondencewith the first gate electrode 154 of the driving transistor 138. Thethird transparent resin layer 150 c is formed on the second sensorelectrodes 116. The third transparent resin layer 150 c is formed insubstantially the same manner as that of the first transparent resinlayer 150 a. It is preferred that the third transparent resin layer 150c is formed to embed the steps caused by the pattern of the secondsensor electrodes 116 and thus to provide a flat surface.

FIG. 11A and FIG. 11B show a stage of forming the shield electrode 126and the fourth transparent resin layer 150 d on the third transparentresin layer 150 c. The shield electrode 126 is formed to coversubstantially the entirety of the third transparent resin layer 150 c.The shield electrode 126 is formed of a transparent conductive film. Thetransparent conductive film is formed of a conductive metal oxide suchas indium tin oxide (ITO), zinc oxide (ZnO), tin oxide (SnO₂),niobium-containing titanium oxide (TiNbO_(x)) or the like. The shieldelectrode 126 is formed by sputtering. The shield electrode 126 may havea thickness of about 50 nm to about 500 nm. In the case where the shieldelectrode 126 is formed of silver (Ag) nanowire, carbon nanotube,graphene or the like, a solution having silver (Ag) nanowire dispersedtherein, a solution having carbon nanotube dispersed therein, or asolution having graphene dispersed therein may be applied to the surfaceof the third transparent resin layer 150 c. Thus, the shield electrode126 is formed.

In the shield electrode 126, the first opening 152 a is formed inpositional correspondence with the first gate electrode 154 of thedriving transistor 138, and the second opening 152 b is formed inpositional correspondence with the first gate electrode 156 of theselection transistor 136. The common line 146 is formed on the shieldelectrode 126. The common line 146 is formed of a metal film of titanium(Ti), aluminum (Al), molybdenum (Mo), copper (Co) or the like.

The first gate electrode 154 is formed in the first opening 152 a. Thefirst gate electrode 154 is formed to have a structure in which thefirst gate electrode layer 154 a formed of the same transparentconductive film as that of the shield electrode 126 and the first gateelectrode layer 154 b formed of the same metal film as that of commonline 146 are stacked on each other. The first gate electrode 156 isformed in the second opening 152 b. The first gate electrode 156 hassubstantially the same structure as that of the first gate electrode154. The first gate electrode 154 and the first gate electrode 156 areformed in the same conductive layer as that of the shield electrode 126and the common line 146, so that the structure and the manufacturingprocedure are simplified. The openings 152, the common line 146 and thefirst gate electrodes 154 and 156 in the shield electrode 126 are formedby multiple tone exposure. This step will be described in detail withreference to FIG. 12A to FIG. 12E.

FIG. 12A to FIG. 12E each show a cross-sectional structure of a regionwhere the driving transistor 138 is located (corresponding to thecross-sectional view of FIG. 11A) in a lithography step of forming theshield electrode 126, the first common line 146 a, the second commonline 146 b and the first gate electrode 154. FIG. 12A to FIG. 12E omitthe components below the third transparent resin layer 150 c.

FIG. 12A shows a stage of forming a transparent conductive film 130 anda metal film 132 on the third transparent resin layer 150 c and exposinga photoresist film 304 formed on the metal film 132. In this step,multiple tone exposure (half-tone exposure) is adopted to form the firstopening 152 a in the shield electrode 126 and also to form the firstcommon line 146 a, the second common line 146 b and the first gateelectrode 154 (including the first gate electrode layer 154 a and thesecond gate electrode layer 154 b) on the shield electrode 126 as shownin FIG. 12E, by use of one photomask. Hereinafter, the steps of theprocedure will be described with reference to FIG. 12A to FIG. 12E.

In FIG. 12A, the photoresist film 304 is positive. As a result ofdevelopment, a non-exposed region of the photoresist film 304 is leftand an exposed region of the photoresist film 304 is removed. Forexposing the photoresist film 304, a multiple tone mask 300 is used. Themultiple tone mask 300 has a multiple tone mask pattern 302. As amultiple tone mask, a gray-tone mask and a half-tone mask are generallyknown. The gray-tone mask has slits of the resolution of the exposuredevice or less, and the slits block a part of the light to realizemultiple tone exposure. The half-tone mask uses a semi-transmissive filmto realize multiple tone exposure. In this embodiment, the half-tonemask is used. The multiple tone mask pattern 302 includes an exposedregion, a semi-exposed region and a non-exposed region. In the exampleshown in FIG. 12A, a region corresponding to the first opening 152 a isthe exposed region except for the region where the first gate electrode154 is to be formed, a region corresponding to the shield electrode 126is the semi-exposed region, and a region corresponding to the firstcommon line 146 a, the second common line 146 b and the first gateelectrode layer 154 b is the non-exposed region.

FIG. 12B shows a stage of exposing the photoresist mask 304 through themultiple tone mask 300 and developing the photoresist mask 304. As aresult of developing the photoresist mask 304, a resist mask pattern 306a including regions having different thicknesses in accordance with theamount of light used for the exposure is formed. FIG. 12B shows a formin which the resist mask pattern 306 a formed of a positive resist isthin in a region corresponding to the region where the first common line146 a, the second common line 146 b and the first gate electrode layer154 b are to be formed, and is thick in a region corresponding to theregion where the shield electrode 126 is to be formed.

FIG. 12C shows a stage of etching the metal film 132 and the transparentconductive film 130 to form the shield electrode 126, the first opening152 a and the first gate electrode layer 154 a. In the case where themetal film 132 is formed of a metal material such as titanium (Ti),molybdenum (Mo) or the like, dry etching using a fluorine-based etchinggas such as CF₄ or the like may be performed. In the case where thetransparent conductive film 130 is formed of a metal oxide such as ITOor the like, dry etching using a chlorine-based etching gas such as BCl₃or the like may be performed. The transparent conductive film 130 isdifficult to be etched by a fluorine-based etching gas such as CF₄ orthe like. Therefore, the metal film 132 may be selectively etched on thetransparent conductive film 130. The metal film 132, which may beselectively etched, and the transparent conductive film 130 are stackedon each other as described above, so that a complex shape is formed byuse of one multiple tone mask 300.

Then, as shown in FIG. 12D, the resist pattern 306 a is treated withoxygen plasma or the like to remove a portion corresponding to thesemi-exposed region, so that a resist mask pattern 306 b is formed. Theresist mask pattern 306 b is used to selectively etch the metal film132. As a result, as shown in FIG. 12E, the first common line 146 a andthe second common line 146 b are formed on the shield electrode 126, andthe first gate electrode layer 154 b is formed on the first gateelectrode layer 154 a. Then, the resist pattern 306 b is removed byashing or the like.

In this manner, the shield electrode 126 having the first opening 152 a,the first common line 146 a, the second common line 146 b and the firstgate electrode 154 (including the first gate electrode layer 154 a andthe second gate electrode layer 154 b) are formed by use of onephotomask and one exposure step. Although not shown in FIG. 12A to FIG.12E, the second opening 152 g and the first gate electrode 156(including the first gate electrode layer 156 a and the second gateelectrode layer 156 b), are formed in substantially the same manner.

The fourth transparent resin layer 150 d is formed on the shieldelectrode 126. The fourth transparent resin layer 150 d is formed insubstantially the same manner as that of the first transparent resinlayer 150 a. The fourth transparent resin layer 150 d flattens the topsurface of the transparent resin substrate 124.

FIG. 13A and FIG. 13B show a stage of forming the first insulating layer158, the transparent conductive layer 160, the common line 146. Thefirst insulating layer 158 is formed by stacking the first siliconnitride film 174 a and the first silicon oxide film 176 a from the sideof the fourth transparent resin layer 150 d. The first silicon nitridefilm 174 a is formed by plasma CVD using, as a source gas, a gas such asSiH₄, HN₃, N₂ or the like. Similarly, the first silicon oxide film 176 ais formed by plasma CVD, optionally using SiH₄, N₂O, Si(OC₂H₅)₄(tetraethoxysilane), Si(OCH₃)₄ (tetramethoxysilane), or the like. Thefirst insulating layer 158 is formed to cover substantially the entiretyof the fourth transparent resin layer 150 d.

After the first insulating layer 158 is formed, the contact hole 153 aexposing the second common line 146 b is formed. The contact hole 153 aruns through the first insulating layer 158 and the fourth transparentresin layer 150 d.

The transparent conductive layer 160 (the first transparent conductivelayer 160 a, the second transparent conductive layer 160 b, the thirdtransparent conductive layer 106 c and the fourth transparent conductivelayer 160 d), the first capacitance electrode 170 a, the data signalline 144, the drain electrode 169 and the third common line 146 c areformed on the first insulating layer 158. The transparent conductivelayer 160 and the first capacitance electrode 170 a are formed of ametal oxide material. Examples of the metal oxide material includeindium tin oxide (ITO), zinc oxide (ZnO), indium zinc oxide (IZO), tinoxide (SnO₂), niobium-containing titanium oxide (TiNbO_(x)), and thelike. The data signal line 144, the drain electrode 169 and the thirdcommon line 146 c are formed of a metal material. Examples of the metalmaterial include titanium (Ti), aluminum (Al), molybdenum (Mo), copper(Co), and the like. Such a line and such an electrode each have astructure in which aluminum (Al) or a core metal mainly formed ofaluminum (Al) is covered with a high melting point metal material suchas titanium (Ti), molybdenum (Mo), copper (Co) or the like providedabove or below aluminum (Al) or the core metal.

The transparent conductive layer 160 (the first transparent conductivelayer 160 a, the second transparent conductive layer 160 b, the thirdtransparent conductive layer 106 c and the fourth transparent conductivelayer 160 d), the first capacitance electrode 170 a, and the thirdcommon line 146 c are formed as follows. The corresponding transparentconductive films and metal film are formed on the first insulating layer158, and then are patterned by multiple tone exposure in substantiallythe same manner as described above with reference to FIG. 12A to FIG.12E. As a result of this step, the second common line 146 b and thethird common line 146 c are electrically connected with each other viathe fourth transparent resin layer 150 d in the region where the contacthole 153 a is formed. The data signal line 144 is formed on the thirdtransparent conductive layer 160 c, and the drain electrode 169 isformed on the fourth transparent conductive layer 160 d.

FIG. 14A and FIG. 14B show a stage of forming the oxide semiconductorlayers 162 (the first oxide semiconductor layer 162 a and the secondoxide semiconductor layer 162 b). The first oxide semiconductor layer162 a is formed to cover substantially the entirety of the firsttransparent conductive layer 160 a and the second transparent conductivelayer 160 b. The second oxide semiconductor layer 162 b is formed tocover substantially the entirety of the third transparent conductivelayer 160 c and the fourth transparent conductive layer 160 d. The firstoxide semiconductor layer 162 a and the second oxide semiconductor layer162 b are formed as follows. An oxide semiconductor film is formed bysputtering with an oxide semiconductor being used as a target, and thenis patterned into island-like as shown in FIG. 4 by lithography. Thus,the first oxide semiconductor layer 162 a and the second oxidesemiconductor layer 162 b are formed. The first oxide semiconductorlayer 162 a is formed to be in contact with, and thus is electricallyconnected with, the first transparent conductive layer 160 a and thesecond transparent conductive layer 160 b. The second oxidesemiconductor layer 162 b is formed to be in contact with, and thus iselectrically connected with, the third transparent conductive layer 160c and the fourth transparent conductive layer 160 d.

FIG. 15A and FIG. 15B show a stage of forming the electron transferlayer 182, the second insulating layer 164, the second gate electrodes166 and 168 and the second capacitance electrode 170 b on the oxidesemiconductor layers 162 (the first oxide semiconductor layer 162 a andthe second oxide semiconductor layer 162 b).

As shown in FIG. 15A, the electron transfer layer 182 is formed on thefirst oxide semiconductor layer 162 a. The electron transfer layer 182is in contact with a top surface of the first oxide semiconductor layer162 a and is individually provided for each pixel 110 a. The electrontransfer layer 182 is formed in a region overlapping the first electrode180 continuous from the first transparent conductive layer 160 a. Likethe first oxide semiconductor layer 162 a, the electron transfer layer182 is formed of an oxide semiconductor. The electron transfer layer 182is formed of an oxide semiconductor material different from the oxidesemiconductor material used to form the first oxide semiconductor layer162 a, and thus is selectively processable on the first oxidesemiconductor layer 162 a. More specifically, the electron transferlayer 182 is formed of an oxide semiconductor material having a higheretching rate than the oxide semiconductor material of the first oxidesemiconductor layer 162 a, and thus is selectively processable. Amultiple tone photomask is used for this process, so that the firstoxide semiconductor layer 162 a and the electron transfer layer 182 areformed at the same time by one exposure step.

For example, it is preferred that the electron transfer layer 182 isformed of a zinc-based oxide semiconductor layer not containing tin (Sn)(e.g., ZnSiO_(x), ZnMgO, ZnGaO_(x), etc.), whereas the oxidesemiconductor layer 162 is formed of a tin (Sn)-based oxidesemiconductor layer not containing zinc (Zn), magnesium (Mg) or the like(e.g., InGaSnO_(x), InWSnO_(x), InSiSnO_(x), etc.). In other words, itis preferred that the electron transfer layer 182 contains zinc oxideand at least one selected from silicon oxide, magnesium oxide andgallium oxide, and that the oxide semiconductor layer 162 contains tinoxide, and at least one selected from indium oxide, gallium oxide,tungsten oxide and silicon oxide. With such an arrangement, the etchingrates of the two layers are made different from each other to increasethe selection ratio. More specifically, the etching rate of the electrontransfer layer 182 is made higher than the etching rate of the oxidesemiconductor layer 162. In addition, the bandgaps of the oxidesemiconductor layer 162 and the electron transfer layer 182 areoptimized. More specifically, the bandgap of the electron transfer layer182 is made larger than the bandgap of the oxide semiconductor layer162. For example, in the case where the bandbap of the oxidesemiconductor layer 162 is 3.0 eV or larger, the bandgap of the electrontransfer layer 182 is larger than, or equal to, the bandgap of the oxidesemiconductor layer 162, preferably 3.4 eV or larger. In the case ofhaving a bandgap of 3.4 eV or larger, the electron transfer layer 182does not absorb blue light and thus improves the reliability. It ispreferred that the oxide semiconductor layer 162 has a thickness of 10nm to 100 nm, whereas the electron transfer layer 182 has a thickness of50 nm to 500 nm. In the case where the oxide semiconductor layer 162 andthe electron transfer layer 182 each have a thickness in such a range,generation of plasmon in the first electrode 180 formed of a transparentconductive oxide is suppressed, which improves the light emissionefficiency of the organic EL element 134.

The second insulating layer 164 is formed to cover the oxidesemiconductor layer 162 and the electron transfer layer 182. The secondinsulating layer 164 is formed by, for example, stacking the secondsilicon oxide film 176 b and the second silicon nitride film 174 b fromthe side of the oxide semiconductor layer 162. As a result, the firstsilicon oxide film 176 a is formed below the oxide semiconductor layer162, and the second silicon oxide film 176 b is formed above the oxidesemiconductor layer 162. The oxide semiconductor layer 162 is heldbetween the oxide insulating films, so that generation of a defectcaused by oxygen deficiency (donor level) is suppressed.

As shown in FIG. 15B, the contact hole 153 b running through the secondinsulating layer 164, the first insulating layer 158 and the fourthtransparent resin layer 150 d and exposing the first common line 146 ais formed. The contact hole 153 c running through the second insulatinglayer 164 and the first oxide semiconductor layer 162 a and exposing thedrain electrode 169 is formed.

Then, the second gate electrodes 166 and 168 and the second capacitanceelectrode 170 b are formed. The second gate electrodes 166 and 168 andthe second capacitance electrode 170 b are formed by performinglithography and etching on a metal film formed on a top surface of thesecond insulating layer 164. The second gate electrode 166 is formed toinclude a region overlapping the first gate electrode 154, and thesecond gate electrode 168 is formed to include a region overlapping thefirst gate electrode 156. As a result, the driving transistor 138 andthe selection transistor 136 are formed. The second gate electrode 166is electrically connected with the drain electrode 169 via the contacthole 153 c. The second capacitance electrode 170 b is electricallyconnected with the first common line 146 a via the contact hole 153 b.The capacitance element 140 is provided in a region where the firstcapacitance electrode 170 a and the second capacitance electrode 170 boverlap each other with the second insulating layer 164 being locatedbetween the first capacitance electrode 170 a and the second capacitanceelectrode 170 b.

FIG. 16A and FIG. 16B show a stage of forming the flattening layer 172and forming the opening 178 exposing the electron transfer layer 182.The flattening layer 172 is formed to embed the selection transistor136, the driving transistor 138 and the capacitance element 140. Theflattening layer 172 is formed of an organic resin material such as, forexample, an acrylic resin, a polyimide resin, an epoxy resin, apolyamide resin or the like. In the flattening layer 172, the opening178 exposing the electron transfer layer 182 is formed. In the casewhere the flattening layer 172 is formed of a photosensitive resinmaterial, the opening 178 is formed by performing exposure by use of aphotomask. In the second insulating layer 164, an opening may be formedin a region corresponding to the opening 178 before the flattening layer172 is formed. It is preferred that the opening 178 has a tapered innersurface for the formation of the organic EL element 134.

Then, the electron injection layer 184, the light emitting layer 186,the hole transfer layer 188, the hole injection layer 190 and the secondelectrode 192 are formed. The transparent resin substrate 124 isdelaminated from the support substrate 200. The transparent resinsubstrate 124 is delaminated by directing laser light toward the supportsubstrate 200. More specifically, ablation is caused between thetransparent resin substrate 124 and the support substrate 200 to weakenthe adherence force of the first transparent resin layer 150 a and thusto delaminate the transparent resin substrate 124.

As a result of the above-described steps, the touch panel display 100including the pixels 110 a shown in FIG. 5A and FIG. 5B is manufactured.The electron injection layer 184 may be formed by sputtering method withC12A7 electride being used as a sputtering target. The electroninjection layer 184 is commonly used for the plurality of pixels 110 a,and therefore, is formed in substantially the entirety of the regionwhere the pixels 110 a are located. The light emitting layer 186 isformed of a different light emitting material for each of a red pixel, agreen pixel and a blue pixel. In the case where the light emitted fromthe light emitting layer 186 has a white light emission spectrum, thelight emitting layer 186 is formed, as a layer common for the pluralityof pixels 110 a, in substantially the entirety of the region where thepixels 110 a are located. The hole transfer layer 188 and the holeinjection layer 190 are each formed, as a layer common for the pluralityof pixels 110 a, in substantially the entirety of the region where thepixels 110 a are located. The second electrode 192 is used as a commonelectrode for the plurality of pixels 110 a, and therefore, are formedin substantially the entirety of the region where the pixels 110 a arelocated.

In the above-described steps, as shown in FIG. 17, the support substrate200 may be a mother glass substrate (substrate on which a plurality ofdevices is to be formed), so that a plurality of display panels 101 areformed on the support substrate 200. In this case, the transparent resinlayers 150 are formed on substantially the entirety of a surface of thesupport substrate 200 except for an end portion thereof, and theplurality of display panels 101 are formed in the region where thetransparent resin layers 150 are formed. In order to individuallyprovide the plurality of display panels 101 formed on the supportsubstrate 200, the transparent resin substrate 124 including thetransparent resin layers 150 is divided along a division region 202. Thedivision of the transparent resin substrate 124 may be performed bylaser processing.

In this case, it is preferred that the shield electrode 126 of atransparent conductive film is not formed in the division region 202. Itis also preferred that neither the first insulating layer 158 nor thesecond insulating layer 164 formed of an inorganic insulating film suchas a silicon oxide film, a silicon nitride film or the like is formed inthe division region 202. The transparent conductive film formed of aninorganic material is not formed in the division region 202, so that theshield electrode 126 is not damaged at the time of division. Similarly,the inorganic insulating films are not formed in the division region202, so that neither the first insulating layer 158 nor the secondinsulating layer 164 is damaged at the time of division.

The method for manufacturing the touch panel display 100 in thisembodiment uses a multiple tone mask to decrease the number ofphotomasks needed for the manufacturing. Use of the multiple tone maskallows a plurality of patterns (the shield electrode 126 and the firstgate electrodes 154 and 156, the second transparent conductive layer 160b and the third common line 146 c, the third transparent conductivelayer 160 c and the data signal line 144, the fourth transparentconductive layer 160 d and the drain electrode 169, the first oxidesemiconductor layer 162 a and the electrode transfer layer 182) to beformed by one exposure step. This increases the productivity of thetouch panel displays 100 and decreases the manufacturing cost thereof.In other words, even in the case where the electrodes forming anembedded-type touch panel (the first sensor electrodes 114 and thesecond sensor electrodes 116) are formed in the display, the number ofthe photomasks needed for the manufacturing is decreased.

In this embodiment, the selection transistor 136 and the drivingtransistor 138 are both of a dual-gate structure. The present inventionis not limited to this. For example, the selection transistor 136 may beof a top-gate type with the first gate electrode 156 being omitted. Thepixel circuit is not limited to the circuit shown in FIG. 3. Thetransistors and the organic EL element in this embodiment are applicableto a structure in which each pixel includes three or more transistors.

Second Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the first embodiment will be described. In the followingdescription, such differences from the first embodiment will bedescribed.

FIG. 18 shows an equivalent circuit of a pixel 110 b in this embodiment.Unlike in the first embodiment, the first gate electrode 156 of theselection transistor 136 and the first gate electrode 154 of the drivingtransistor 138 are electrically connected with the first common line 146a. Except for this, the equivalent circuit shown in FIG. 18 issubstantially the same as the equivalent circuit shown in FIG. 3.

FIG. 19 shows an example of planar structure of the pixel 110 b in thetouch panel display in this embodiment. FIG. 20A shows a cross-sectionalstructure of the pixel 110 b taken along line A3-A4 shown in FIG. 19.FIG. 20B shows a cross-sectional structure of the pixel 110 b takenalong line B3-B4 shown in FIG. 19. In the following description, thesefigures will be referred to, as necessary.

The shield electrode 126 is provided in the entirety of the pixel 110 b.The shield electrode 126 is provided to overlap the driving transistor138 and the selection transistor 136. In other words, the shieldelectrode 126 in the pixel 110 b this embodiment does not have anopening, unlike the shield electrode 126 in the pixel 110 a in the firstembodiment.

The driving transistor 138 includes a light blocking electrode 155provided in a region overlapping the second gate electrode 166. Thelight blocking electrode 155 is located between the shield electrode 126and the fourth transparent resin layer 150 d, and is in contact with theshield electrode 126. The light blocking electrode 155 is formed of ametal film, like the first gate electrode layer 154 b in the firstembodiment. The shield electrode 126 is formed of a transparentconductive film whereas the light blocking electrode 155 is formed of ametal film, so that light incident on the transparent resin substrate124 is prevented from being incident on the channel region of thedriving transistor 138. This suppresses the threshold voltage of thedriving transistor 138 from being fluctuated.

The light blocking electrode 155 is supplied with the same potential asthat of the shield electrode 126. The shield electrode 126 is suppliedwith, for example, the ground potential, and thus the light blockingelectrode 155 is also supplied with the ground potential. The drivingtransistor 138 is supplied, via the first insulating layer 158, with acertain potential at a surface, of the first oxide semiconductor layer162 a where channel region is formed, opposite to the second electrode166 (the surface opposite to the second electrode 166 is referred to asa “back channel”). Since the potential of the back channel isstabilized, the threshold voltage of the driving transistor 138 issuppressed from being fluctuated. In this embodiment, the light blockingelectrode 155 may be omitted.

Like the driving transistor 138, the selection transistor 136 includes alight blocking electrode 157. Therefore, the selection transistor 136 isprotected against light by the light blocking electrode 157, and thusthe potential of the back channel is stabilized. This suppresses thethreshold voltage of the selection transistor 136 from being fluctuated.

The light blocking electrodes 155 and 157 on the shield electrode 126may be patterned by use of multiple tone exposure, like in the firstembodiment. More specifically, the light blocking electrodes 155 and 157may be formed with no increase in the number of the photomasks, like inthe first embodiment. [0130]

In this embodiment, the pixel 110 b has substantially the same structureas that of the pixel 110 a in the first embodiment except for the lightblocking electrodes 155 and 157. Therefore, the touch panel display inthis embodiment provides substantially the same function and effect asthose in the first embodiment.

Third Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the first embodiment will be described. In the followingdescription, such differences from the first embodiment will bedescribed.

FIG. 21 shows an equivalent circuit of a pixel 110 c in this embodiment.Unlike in the first embodiment, the first gate electrode 154 of thedriving transistor 138 is electrically connected with the first commonline 146 a. Except for this, the equivalent circuit shown in FIG. 21 issubstantially the same as the equivalent circuit shown in FIG. 3.

FIG. 22 shows an example of planar structure of the pixel 110 c in thetouch panel display in this embodiment. FIG. 23A shows a cross-sectionalstructure of the pixel 110 c taken along line A5-A6 shown in FIG. 22.FIG. 23B shows a cross-sectional structure of the pixel 110 c takenalong line B5-B6 shown in FIG. 22. In the following description, thesefigures will be referred to, as necessary.

In the pixel 110 c, the shield electrode 126 is provided to cover thedriving transistor 138. By contrast, the shield electrode 126 has thesecond opening 152 b in a region where the selection transistor 136 isprovided. The driving transistor 138 includes the light blockingelectrode 155 provided in a region overlapping the second gate electrode166. The light blocking electrode 155 is located between the shieldelectrode 126 and the fourth transparent resin layer 150 d, and is incontact with the shield electrode 126. With such a structure, lightincident on the transparent resin substrate 124 is prevented from beingincident on the channel region of the driving transistor 138. Thissuppresses the threshold voltage of the driving transistor 138 frombeing fluctuated.

The selection transistor 136 has a dual-gate structure in which thesecond semiconductor oxide layer 162 b is held between the first gateelectrode 156 and the second gate electrode 168. This improves theswitching characteristics of, and decreases the off-current of, theselection transistor 136.

In this embodiment, the pixel 110 c has substantially the same structureas that of the pixel 110 a in the first embodiment except for the shieldelectrode 126 and the light blocking electrode 155. Therefore, the touchpanel display in this embodiment provides substantially the samefunction and effect as those in the first embodiment.

Fourth Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the first embodiment will be described. In the followingdescription, such differences from the first embodiment will bedescribed.

FIG. 24 shows an equivalent circuit of a pixel 110 d in this embodiment.Unlike in the first embodiment, the first gate electrode 156 of theselection transistor 136 is electrically connected with the first commonline 146 a. Except for this, the equivalent circuit shown in FIG. 24 isthe same as the equivalent circuit shown in FIG. 3.

FIG. 25 shows an example of planar structure of the pixel 110 d in thetouch panel display in this embodiment. FIG. 26A shows a cross-sectionalstructure of the pixel 110 d taken along line A7-A8 shown in FIG. 25.FIG. 26B shows a cross-sectional structure of the pixel 110 d takenalong line B7-B8 shown in FIG. 25. In the following description, thesefigures will be referred to, as necessary.

In the pixel 110 d, the shield electrode 126 is provided to cover theselection transistor 136. By contrast, the shield electrode 126 has thefirst opening 152 a in a region where the driving transistor 138 isprovided. The selection transistor 136 includes the light blockingelectrode 157 provided in a region overlapping the second gate electrode168. The light blocking electrode 157 is located between the shieldelectrode 126 and the fourth transparent resin layer 150 d, and is incontact with the shield electrode 126. With such a structure, lightincident on the transparent resin substrate 124 is prevented from beingincident on the channel region of the selection transistor 136. Thissuppresses the threshold voltage of the selection transistor 136 frombeing fluctuated.

Meanwhile, the driving transistor 138 has a dual-gate structure in whichthe first semiconductor oxide layer 162 a is held between the first gateelectrode 154 and the second gate electrode 166. The first gateelectrode 154 and the second gate electrode 166 are electricallyconnected with each other and thus are supplied with the same potential.This improves the current driving capability of the driving transistor138, and thus the driving transistor 138 supplies a sufficient level ofcurrent to drive the organic EL element 134.

In this embodiment, the pixel 110 d has substantially the same structureas that of the pixel 110 a in the first embodiment except for the shieldelectrode 126 and the light blocking electrode 157. Therefore, the touchpanel display in this embodiment provides substantially the samefunction and effect as those in the first embodiment.

Fifth Embodiment

In this embodiment, a form in which the structures of the drivingtransistor 138 and the selection transistor 136 are different from thosein the first embodiment will be described. Specifically, the drivingtransistor 138 and the selection transistor 136 are formed of apolycrystalline silicon film. In the following description, componentsthat are the same as those in the first embodiment will not bedescribed, and the above-described differences from the first embodimentwill be mainly described.

FIG. 27 shows an example of planar structure of a pixel 110 e in a touchpanel display in this embodiment. FIG. 28A shows a cross-sectionalstructure of the pixel 110 e taken along line A9-A10 shown in FIG. 28.FIG. 28B shows a cross-sectional structure of the pixel 110 e takenalong line B9-B10 shown in FIG. 28. In the following description, thesefigures will be referred to, as necessary.

As shown in FIG. 28A and FIG. 28B, the organic EL element 134, thedriving transistor 138, the selection transistor 136, and thecapacitance element 140 are located on the transparent resin substrate124. The structure of the transparent resin substrate 124 issubstantially the same as that in the first embodiment.

As shown in FIG. 27 and FIG. 28A, the driving transistor 138 includes afirst semiconductor layer 163 a. The first semiconductor layer 163 a isformed of a tetrahedral semiconductor, for example, polycrystallinesilicon. Below the first semiconductor layer 163 a, the first gateelectrode 154 is located with the first insulating layer 158 and thefourth transparent resin layer 150 d being located between the firstsemiconductor layer 163 a and the first gate electrode 154. Above thefirst semiconductor layer 163 a, the second gate electrode 166 islocated with the second insulating layer 164 being located between thefirst semiconductor layer 163 a and the second gate electrode 166. Thestructures of the first gate electrode 154 and the second gate electrode166 are substantially the same as those in the first embodiment. Thefirst semiconductor layer 163 a includes impurity regions 165 a and 165b containing impurity elements provided to control valence electrons. Inthe driving transistor 138, the impurity region 165 b is connected withthe second common line 146 b, and the impurity region 165 a is connectedwith a drain electrode 169 b. The drain electrode 169 b is electricallyconnected with the first electrode 180 of the organic EL element 134.The first electrode 180 is formed of a transparent conductive film. Athird insulating layer 171 is provided between the second gate electrode166 and the flattening layer 172. The second common line 146 b and thedrain electrode 169 b are provided between the third insulating layer171 and the flattening layer 172.

As shown in FIG. 27 and FIG. 28B, the selection transistor 136 includesa second semiconductor layer 163 b. The second semiconductor layer 163 bis also formed of a tetrahedral semiconductor, for example,polycrystalline silicon. Below the second semiconductor layer 163 b, thefirst gate electrode 156 is located with the first insulating layer 158and the fourth transparent resin layer 150 d being located between thesecond semiconductor layer 163 b and the first gate electrode 156. Abovethe second semiconductor layer 163 b, the second gate electrode 168 islocated with the second insulating layer 164 being located between thesecond semiconductor layer 163 b and the second gate electrode 168. Animpurity region 165 c of the second semiconductor layer 163 b isconnected with the data signal line 144, and an impurity region 165 d ofthe second semiconductor layer 163 b is connected with a drain electrode169 c.

A polycrystalline silicon film used to form the semiconductor layer 163is formed by crystallizing an amorphous silicon film formed by plasmaCVD on the first insulating layer 158. The amorphous silicon film iscrystallized by directing laser light thereto (referred to as “laserannealing”) . As a laser light source, for example, a third harmonic ofan excimer laser or a YAG laser is usable. The laser light is ultrasoniclight and is absorbed by an amorphous silicon film substantiallyentirety. Therefore, the transparent resin substrate 124 is notthermally damaged.

The capacitance element 140 includes the first capacitance electrode 170a formed in the same layer as that of the second gate electrode 168, thesecond capacitance electrode 170 b formed in the same layer as that ofthe drain electrode 169 c, and the third insulating layer 171 locatedbetween the first capacitance electrode 170 a and the second capacitanceelectrode 170 b. The drain electrode 169 c and the second capacitanceelectrode 170 b of the selection transistor 136 are electricallyconnected with each other. FIG. 27 and FIG. 28B show a form in which thedrain electrode 169 c and the second capacitance electrode 170 b areformed of one continuous conductive layer.

As shown in FIG. 29A, the impurity region 165 d may be extended to aregion bellow the first capacitance electrode 170 a, so that the areasize of the capacitance element 140 is enlarged to increase thecapacitance without decreasing the aperture ratio of the pixel 110 e.FIG. 29B shows an equivalent circuit of the capacitance element 140. Asshown in FIG. 29B, the capacitance element 140 has a structure in whicha capacitance formed between the drain electrode 169 c and the firstcapacitance electrode 170 a, a capacitance formed between the impurityregion 165 d having the same potential as that of the drain electrode169 c and the first capacitance electrode 170 a, and a capacitanceformed between the impurity region 165 d and the shield electrode 126having the same potential as that of the first capacitance electrode 170a are connected in parallel. With such a stack structure, thecapacitance element 140 increases the capacitance thereof even thoughthe area size of a projected area as seen in a plan view is not changed.

As shown in FIG. 28A, the organic EL element 134 has the same structureas that in the first embodiment. In this embodiment, the drivingtransistor 138 and the selection transistor 136 each have an n-channelconductivity. In other words, since the impurity region 165 is formed ofan n-type semiconductor, the driving transistor 138 and the selectiontransistor 136 each have an n-channel conductivity. Therefore, the touchpanel display in this embodiment operates in substantially the samemanner as that in the first embodiment.

The first gate electrode 154 and the second gate electrode 166 of thedriving transistor 138 are electrically connected with each other andare supplied with the same gate voltage. The driving transistor 138 hassuch a dual-gate structure, and thus improves the current drivingcapability thereof. Therefore, the driving transistor 138 supplies asufficient level of current to drive the organic EL element 134. Even ifthe operation point of the organic EL element 134 is fluctuated, theconstant current driving is performed in accordance with the fluctuationof the operation point. The first gate electrode 156 and the second gateelectrode 168 of the selection transistor 136 are electrically connectedwith each other. The selection transistor 136 has such a dual-gatestructure, and thus suppresses the threshold voltage thereof from beingfluctuated and increases the on/off ratio thereof.

As described in this embodiment, the touch panel display including thetouch panel 108 embedded in the transparent resin substrate 124 is alsorealized by use of transistors formed of polycrystalline silicon. Thetransistors including the channel region of polycrystalline siliconprovide a high field effect mobility. Therefore, the current drivingcapability of the driving transistor 138 is improved, whichadvantageously contributes to increase in the precision of the pixels110 e.

The touch panel display in this embodiment has substantially the samestructure as that in the first embodiment except that the transistorsare formed of polycrystalline silicon. Therefore, the touch paneldisplay in this embodiment provides substantially the same function andeffect as those in the first embodiment.

Sixth Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the fifth embodiment will be described. In the followingdescription, such differences from the fifth embodiment will bedescribed.

FIG. 30 shows an example of planar structure of a pixel 110 f in thetouch panel display in this embodiment. FIG. 31A shows a cross-sectionalstructure of the pixel 110 f taken along line All-Al2 shown in FIG. 30.FIG. 31B shows a cross-sectional structure of the pixel 110 f takenalong line B11-B12 shown in FIG. 30. In the following description, thesefigures will be referred to, as necessary.

The pixel 110 f has substantially the same structure as that in thefifth embodiment except that the first opening 152 a and the secondopening 152 b are omitted and that the shield electrode 126 is providedin the entirety of the pixel 110 f.

The driving transistor 138 includes the light blocking electrode 155provided in a region overlapping the second gate electrode 166. Thelight blocking electrode 155 is located between the shield electrode 126and the fourth transparent resin layer 150 d, and is in contact with theshield electrode 126. The light blocking electrode 155 is formed of ametal film, like in the second embodiment. The light blocking electrode155 prevents light incident on the transparent resin substrate 124 frombeing incident on the channel region of the driving transistor 138. Thissuppresses the threshold voltage of the driving transistor 138 frombeing fluctuated.

The light blocking electrode 155 is supplied with the same potential asthat of the shield electrode 126. The shield electrode 126 is suppliedwith, for example, the ground potential, and thus the light blockingelectrode 155 is also supplied with the ground potential. The drivingtransistor 138 is supplied, via the first insulating layer 158, with acertain potential in the back channel of the first semiconductor layer163 a where the channel region is formed. This suppresses the thresholdvoltage of the driving transistor 138 from being fluctuated.

Like the driving transistor 138, the selection transistor 136 includesthe light blocking electrode 157. Therefore, the selection transistor136 is protected against light by the light blocking electrode 157, andthus the potential of the back channel is stabilized. This suppressesthe threshold voltage of the selection transistor 136 from beingfluctuated.

In this embodiment, the pixel 110 f has substantially the same structureas that of the pixel 110 e in the fifth embodiment except for the lightblocking electrodes 155 and 157. Therefore, the touch panel display inthis embodiment provides substantially the same function and effect asthose in the fifth embodiment.

Seventh Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the fifth embodiment will be described. In the followingdescription, such differences from the fifth embodiment will bedescribed.

FIG. 32 shows an example of planar structure of a pixel 110 g in thetouch panel display in this embodiment. FIG. 33A shows a cross-sectionalstructure of the pixel 110 g taken along line A13-A14 shown in FIG. 32.FIG. 33B shows a cross-sectional structure of the pixel 110 g takenalong line B13-B14 shown in FIG. 32. In the following description, thesefigures will be referred to, as necessary.

In the pixel 110 g, the shield electrode 126 is provided to cover thedriving transistor 138. By contrast, the shield electrode 126 has thesecond opening 152 b in a region where the selection transistor 136 isprovided. The driving transistor 138 includes the light blockingelectrode 155 provided in a region overlapping the second gate electrode166. The light blocking electrode 155 is located between the shieldelectrode 126 and the fourth transparent resin layer 150 d, and is incontact with the shield electrode 126. With such a structure, lightincident on the transparent resin substrate 124 is prevented from beingincident on the channel region of the driving transistor 138.

The selection transistor 136 has a dual-gate structure in which thesecond semiconductor layer 163 b is held between the first gateelectrode 156 and the second gate electrode 168. This improves theswitching characteristics of, and decreases the off-current of, theselection transistor 136. The first gate electrode 156 of the selectiontransistor 136 has a structure in which the first gate electrode layer156 a formed of a transparent conductive film and the second gateelectrode layer 156 b formed of a metal film are stacked on each other.Therefore, the selection transistor 136 also has a function of a lightblocking film.

In this embodiment, the pixel 110 g has substantially the same structureas that of the pixel 110 e in the fifth embodiment except for the shieldelectrode 126 and the light blocking electrode 155. Therefore, the touchpanel display in this embodiment provides substantially the samefunction and effect as those in the fifth embodiment.

Eighth Embodiment

In this embodiment, regrading a touch panel display including a touchsensor function of sensing a touch on a screen and a display function ofdisplaying an image on the screen, differences in the pixel structurefrom the fifth embodiment will be described. In the followingdescription, such differences from the fifth embodiment will bedescribed.

FIG. 34 shows an example of planar structure of a pixel 110 h in thetouch panel display in this embodiment. FIG. 35A shows a cross-sectionalstructure of the pixel 110 h taken along line A15-A16 shown in FIG. 34.FIG. 35B shows a cross-sectional structure of the pixel 110 h takenalong line B15-B16 shown in FIG. 34. In the following description, thesefigures will be referred to, as necessary.

In the pixel 110 h, the shield electrode 126 is provided to cover theselection transistor 136. By contrast, the shield electrode 126 has thefirst opening 152 a in a region where the driving transistor 138 isprovided. The selection transistor 136 includes the light blockingelectrode 157 provided in a region overlapping the second gate electrode168. The light blocking electrode 157 is located between the shieldelectrode 126 and the fourth transparent resin layer 150 d, and is incontact with the shield electrode 126. With such a structure, lightincident on the transparent resin substrate 124 is prevented from beingincident on the channel region of the selection transistor 136. Thissuppresses the threshold voltage of the selection transistor 136 frombeing fluctuated.

Meanwhile, the driving transistor 138 has a dual-gate structure in whichthe first semiconductor layer 163 a is held between the first gateelectrode 154 and the second gate electrode 166. The first gateelectrode 154 and the second gate electrode 166 are electricallyconnected with each other and thus are supplied with the same potential.This improves the current driving capability of the driving transistor138, and thus the driving transistor 138 supplies a sufficient level ofcurrent to drive the organic EL element 134.

In this embodiment, the pixel 110 h has substantially the same structureas that of the pixel 110 e in the fifth embodiment except for the shieldelectrode 126 and the light blocking electrode 157. Therefore, the touchpanel display in this embodiment provides substantially the samefunction and effect as those in the fifth embodiment.

Ninth Embodiment

In this embodiment, an example of touch panel display in which thesensor electrodes embedded in the transparent resin substrate each havea diamond shape will be described. In the following embodiment,components that are the same as those in the first embodiment and thesecond embodiment will not be described, and differences therefrom willbe mainly described.

FIG. 36 shows a planar structure of the first sensor electrodes 114 andthe second sensor electrodes 116 forming a mutual capacitance-systemelectrostatic capacitance-type touch sensor. Each of the first sensorelectrodes 114 is a receiver electrode (Rx electrode), and sequentiallyoutputs detection signals (Vdet). By contrast, each of the second sensorelectrodes 116 is a transmitter electrode (Tx electrode), and issupplied with a common driving signal (Vcom). The first sensorelectrodes 114 are each of a diamond shape and are connected with eachother in one direction (in the Y direction shown in FIG. 36), whereasthe second sensor electrodes 116 are each of a diamond shape and areconnected with each other in a direction crossing the one direction (inthe X direction shown in FIG. 36). Although not shown in FIG. 36, thefirst sensor electrodes 114 and the second sensor electrodes 116 areformed in different layers from each other with an insulating layerbeing located between the first sensor electrodes 114 and the secondsensor electrodes 116. The first sensor electrodes 114 and the secondsensor electrodes 116 are each formed of a transparent conductive filmor a metal film. In the case where a transparent conductive film isused, the first sensor electrodes 114 are formed in diamond patternsprovided to spread two-dimensionally, and the second sensor electrodes116 are also formed in diamond patterns provided to spreadtwo-dimensionally. By contrast, in the case where a metal film is used,the first sensor electrodes 114 are formed in a mesh pattern withopenings being formed in positional correspondence with the pixels, andthe second sensor electrodes 116 are also formed in a mesh pattern withopenings being formed in positional correspondence with the pixels. Ineither case, diamond-shaped electrodes are adopted, so that the firstsensor electrodes 114 and the second sensor electrodes 116 are locateddensely.

FIG. 37A and FIG. 37B show an example of pixel 110 i of a touch paneldisplay in which the diamond-shaped electrodes shown in FIG. 36 areembedded in a transparent resin substrate 124 b. FIG. 37A shows across-sectional structure of the pixel 110 i corresponding to thecross-sectional structure taken along line A1-A2 shown in FIG. 4. FIG.37B shows a cross-sectional structure of the pixel 110 i correspondingto the cross-sectional structure taken along line B1-B2 shown in FIG. 4.The structure of the driving transistor 138 and the organic EL element134 shown in FIG. 37A and the structure of the selection transistor 136and the capacitance element 140 shown in FIG. 37B are substantially thesame as those in the first embodiment.

The transparent resin substrate 124 b has a structure in which the firsttransparent resin layer 150 a, the first sensor electrodes 114, theinorganic insulating layer 151, the second sensor electrodes 116, thethird transparent resin layer 150 c, the shield electrode 126 and thefourth transparent resin layer 150 d are stacked. In the case where thesecond sensor electrodes 116 used as the transmitter electrodes (Txelectrodes) provided to spread two-dimensionally are located asoverlapping the driving transistors 138, it is preferred that the secondsensor electrodes 116 each have the opening 119 in positionalcorrespondence with the corresponding driving transistor 138. Theopening 119 is provided, so that the electric field generated by adriving signal applied to the second sensor electrode 116 is preventedfrom influencing the first gate electrode 154 of the driving transistor138. In this embodiment also, it is preferred that the third transparentresin layer 150 c has a thickness of 10 μm or greater, preferably 15 μmor greater, in order to put the first gate electrode 154 far from thesecond sensor electrode 116.

The first sensor electrodes 114 and the second sensor electrodes 116 areprovided with the organic insulating layer 151 being located between thefirst sensor electrodes 114 and the second sensor electrodes 116 so asnot to be short-circuited. It is preferred that the organic insulatinglayer 151 is formed of an insulating film that has a low moisturepermeability and is visible light-transmissive such as a silicon nitridefilm, an aluminum oxide film or the like. The organic insulating layer151 may have a thickness of 100 nm to 300 nm, and is formed onsubstantially the entirety of the transparent resin substrate 124 b. Theorganic insulating layer 151 provided in the transparent resin substrate124 b improves the barrier property against water vapor. This suppressesthe organic EL element 134 provided on the transparent resin substrate124 b from being deteriorated.

A silicon nitride film is considered to have a relative dielectricconstant of 6 to 8, and an aluminum oxide is considered to have arelative dielectric constant of 8 to 10, which are both higher than thatof a transparent resin layer (for example, a polyimide resin isconsidered to have a relative dielectric constant of 4 to 5). Inaddition, the inorganic insulating layer 151 is formed to have athickness of 100 nm to 300 nm. Therefore, the capacitance formed betweenthe first sensor electrodes 114 and the second sensor electrodes 116 isincreased. This improves the sensitivity of the touch sensor 108. As canbe seen, the touch panel display in this embodiment increases themoisture resistance and the sensitivity of the touch panel 108 inaddition to having the function and effect of the touch panel display100 in the first embodiment.

FIG. 38A and FIG. 38B show an example of pixel 110 j of a touch paneldisplay in which the diamond-shaped electrodes shown in FIG. 36 areembedded in the transparent resin substrate 124 b. FIG. 38A shows across-sectional structure of the pixel 110 j corresponding to thecross-sectional structure taken along line A3-A4 shown in FIG. 19. FIG.38B shows a cross-sectional structure of the pixel 110 j correspondingto the cross-sectional structure taken along line B3-B4 shown in FIG.19.

The structure of the driving transistor 138 and the organic EL element134 shown in FIG. 38A and the structure of the selection transistor 136and the capacitance element 140 shown in FIG. 38B are substantially thesame as those in the second embodiment. The transparent resin substrate124 b has substantially the same structure as that shown in FIG. 37A andFIG. 37B except that the shield electrode 126 is provided insubstantially the entirety thereof. Therefore, the touch panel displayin this embodiment increases the moisture resistance and the sensitivityof the touch panel 108 in addition to having the function and effect ofthe touch panel display 100 in the second embodiment.

Tenth Embodiment

In this embodiment, an example of touch panel display in which thesensor electrodes embedded in the transparent resin substrate each havea diamond shape will be described. In the following embodiment,components that are the same as those in the fifth embodiment and thesixth embodiment will not be described, and differences therefrom willbe mainly described.

FIG. 39A and FIG. 39B show an example of pixel 110 k of a touch paneldisplay in which the diamond-shaped electrodes shown in FIG. 36 areembedded in the transparent resin substrate 124 b. FIG. 39A shows across-sectional structure of the pixel 110 k corresponding to thecross-sectional structure taken along line A9-A10 shown in FIG. 27. FIG.39B shows a cross-sectional structure of the pixel 110 k correspondingto the cross-sectional structure taken along line B9-B10 shown in FIG.27. The structure of the driving transistor 138 and the organic ELelement 134 shown in FIG. 39A and the structure of the selectiontransistor 136 and the capacitance element 140 shown in FIG. 39B aresubstantially the same as those in the fifth embodiment.

The transparent resin substrate 124 b has substantially the samestructure as that in the ninth embodiment. Therefore, the touch paneldisplay in this embodiment increases the moisture resistance and thesensitivity of the touch panel 108 in addition to having the functionand effect of the touch panel display 100 in the fifth embodiment.

FIG. 40A and FIG. 40B show an example of pixel 110 m of a touch paneldisplay in which the diamond-shaped electrodes shown in FIG. 36 areembedded in the transparent resin substrate 124 b. FIG. 40A shows across-sectional structure of the pixel 110 m corresponding to thecross-sectional structure taken along line A11-A12 shown in FIG. 30.FIG. 40B shows a cross-sectional structure of the pixel 110 mcorresponding to the cross-sectional structure taken along line B11-B12shown in FIG. 30.

The structure of the driving transistor 138 and the organic EL element134 shown in FIG. 40A and the structure of the selection transistor 136and the capacitance element 140 shown in FIG. 40B are substantially thesame as those in the sixth embodiment. The transparent resin substrate124 b has substantially the same structure as that shown in FIG. 39A andFIG. 39B except that the shield electrode 126 is provided insubstantially the entirety of the transparent resin substrate 124 b.Therefore, the touch panel display in this embodiment increases themoisture resistance and the sensitivity of the touch panel 108 inaddition to having the function and effect of the touch panel display100 in the sixth embodiment.

Eleventh Embodiment

In this embodiment, various forms of the first sensor electrodes 114 andthe second sensor electrodes 116 forming the touch sensor 108 will bedescribed.

FIG. 41A shows an example of first sensor electrodes 114. The firstsensor electrodes 114 shown in FIG. 41A include an electrode portion 121and a connection portion 123. The electrode portion 121 extends from afirst end of the display portion 102 in a direction along the datasignal line 144 to a second end facing the first end. The connectionportion 123 is outer to the display portion 102 and is connected withthe second driving circuit 112 b. The first sensor electrodes 114 areformed of a metal film of aluminum (Al), titanium (Ti), molybdenum (Mo),copper (Cu) or the like. In the first sensor electrodes 114 shown inFIG. 41A, the electrode portion 121 includes linear patterns, whereasthe connection portion 123 includes a two-dimensional solid pattern (theconnection portion 123 is entirely formed of a metal material). Thelinear patterns each have a line width that is substantially equal tothat of each of the data signal lines 144 provided in the displayportion 102, and are located at the same interval (or pitch) as that ofthe data signal lines 144.

FIG. 41B shows another example of first sensor electrodes 114. In thefirst sensor electrodes 114 shown in FIG. 41B, the electrode portion 121has a lattice pattern including a plurality of squares. The latticepattern in the electrode portion 121 is provided such that lines ofsquares that are arrayed parallel to the gate signal line 142 each havea line width that is substantially equal to that of each of the gatesignal lines 142, and are located at the same interval (or pitch) asthat of the gate signal lines 142. The lattice pattern in the electrodeportion 121 is provided such that lines of squares that are arrayedparallel to the data signal line 144 each have a line width that issubstantially equal to that of each of the data signal lines 144, andare located at the same interval (or pitch) as that of the data signallines 144. Alternatively, the lattice pattern in the electrode portion121 may be provided such that the lines of squares that are arrayedparallel to the gate signal line 142 each have a line width that issubstantially equal to that of each of the gate signal lines 142, andare located at the same interval (or pitch) as that of the gate signallines 142; and such that the lines of squares that are arrayed parallelto the data signal line 144 each have a line width that is substantiallyequal to that of each of the data signal lines 144, and are located atthree times the interval (or pitch) of that of the data signal lines144.

FIG. 42A shows an example of second sensor electrodes 116. The secondsensor electrodes 116 shown in FIG. 42A include an electrode portion 125and a connection portion 127. The electrode portion 125 extends from afirst end of the display portion 102 in a direction along the gatesignal line 142 to a second end facing the first end. The connectionportion 127 is outer to the display portion 102 and is connected withthe third driving circuit 112 c. The second sensor electrodes 116 areformed of a metal film of aluminum (Al), titanium (Ti), molybdenum (Mo),copper (Cu) or the like. In the second sensor electrodes 116 shown inFIG. 42A, the electrode portion 125 includes linear patterns, whereasthe connection portion 127 includes a two-dimensional solid pattern (theconnection portion 127 is entirely formed of a metal material). Thelinear patterns each have a line width that is substantially equal tothat of each of the gate signal lines 142 provided in the displayportion 102, and are located at the same interval (or pitch) as that ofthe gate signal lines 142.

FIG. 42B shows another example of second sensor electrodes 116. In thesecond sensor electrodes 116 shown in FIG. 42B, the electrode portion125 has a lattice pattern including a plurality of squares. The latticepattern in the electrode portion 125 is provided such that lines ofsquares that are arrayed parallel to the gate signal line 142 each havea line width that is substantially equal to that of each of the gatesignal lines 142, and are located at the same interval (or pitch) asthat of the gate signal lines 142. The lattice pattern in the electrodeportion 125 is provided such that lines of squares that are arrayedparallel to the data signal line 144 each have a line width that issubstantially equal to that of each of the data signal lines 144, andare located at the same interval (or pitch) as that of the data signallines 144. Alternatively, the lattice pattern in the electrode portion125 may be provided such that the lines of squares that are arrayedparallel to the gate signal line 142 each have a line width that issubstantially equal to that of each of the gate signal lines 142, andare located at the same interval (or pitch) as that of the gate signallines 142; and such that the lines of squares that are arrayed parallelto the data signal line 144 each have a line width that is substantiallyequal to that of each of the data signal lines 144, and are located atthree times the interval (or pitch) of that of the data signal lines144.

In each of the examples shown in FIG. 41A, FIG. 41B, FIG. 42A and FIG.42B, the first sensor electrodes 114 and the second sensor electrodes116 are embedded in the transparent resin substrate 124. Therefore, forexample, a metal film used to form the first sensor electrodes 114 andthe second sensor electrodes 116 may be used to form an alignmentmarker. The alignment marker may be used to align the photomask used toform the data signal lines 144 in a later step, so that the first sensorelectrodes 114, the second sensor electrodes 116, the gate signal lines142 and the data signal lines 144 are positionally matched preciselywith each other.

The first sensor electrodes 114 and the second sensor electrodes 116 inthis embodiment have the same line width as that of the gate signal line122 and the data signal line 144, and are located at the same pitch asthat of the gate signal lines 142 and the data signal lines 144.Therefore, even in the case where the touch panel display is of a bottomemission-type, the touch sensor 108 is embedded in the transparent resinsubstrate 124 without decreasing the aperture ratio of the pixels. Inaddition, the first sensor electrodes 114 and the second sensorelectrodes 116 are formed of a metal material, so that the resistance isdecreased.

This embodiment may be appropriately combined with the touch sensor ofthe touch panel display in any of the first embodiment to the tenthembodiment.

Twelfth Embodiment

In this embodiment, various forms of the first sensor electrodes 114 andthe second sensor electrodes 116 forming the touch sensor 108 will bedescribed.

FIG. 43A shows an example of first sensor electrodes 114. The firstsensor electrodes 114 shown in FIG. 43A include an electrode portion 121including diamond-shaped electrode patterns, and a connection portion123 provided at an end of the electrode portion 121. The electrodeportion 121 extends from a first end of the display portion 102 in adirection along the data signal line 144 to a second end facing thefirst end. The connection portion 123 is outer to the display portion102 and is connected with the second driving circuit 112 b. In the firstsensor electrodes 114 shown in FIG. 43A, the electrode portion 121includes linear patterns, whereas the connection portion 123 has atwo-dimensional solid pattern (the connection portion 123 is entirelyformed of a metal material). The linear patterns each have a line widththat is substantially equal to that of each of the data signal lines 144provided in the display portion 102, and are located at the sameinterval (or pitch) as that of the data signal lines 144.

FIG. 43B shows another example of first sensor electrodes 114. In thefirst sensor electrodes 114 shown in FIG. 43B, the electrode portion121, including diamond-shaped electrode patterns, has a lattice patternincluding a plurality of squares. The lattice pattern in the electrodeportion 121 is provided such that lines of squares that are arrayedparallel to the gate signal line 142 each have a line width that issubstantially equal to that of each of the gate signal lines 142, andare located at the same interval (or pitch) as that of the gate signallines 142. The lattice pattern in the electrode portion 121 is providedsuch that lines of squares that are arrayed parallel to the data signalline 144 each have a line width that is substantially equal to that ofeach of the data signal lines 144, and are located at the same interval(or pitch) as that of the data signal lines 144. Alternatively, thelattice pattern in the electrode portion 121 may be provided such thatthe lines of squares that are arrayed parallel to the gate signal line142 each have a line width that is substantially equal to that of eachof the gate signal lines 142, and are located at the same interval (orpitch) as that of the gate signal lines 142; and such that the lines ofsquares that are arrayed parallel to the data signal line 144 each havea line width that is substantially equal to that of each of the datasignal lines 144, and are located at three times the interval (or pitch)of that of the data signal lines 144.

FIG. 44A shows an example of second sensor electrodes 116. The secondsensor electrodes 116 shown in FIG. 44A include an electrode portion 125including diamond-shaped electrode patterns, and a connection portion127. The electrode portion 125 extends from a first end of the displayportion 102 in a direction along the gate signal line 142 to a secondend facing the first end. The connection portion 127 is outer to thedisplay portion 102 and is connected with the third driving circuit 112c. In the second sensor electrodes 116 shown in FIG. 44A, the electrodeportion 125 includes linear patterns, whereas the connection portion 127includes a two-dimensional solid pattern (the connection portion 127 isentirely formed of a metal material). The linear patterns each have aline width that is substantially equal to that of each of the gatesignal lines 142 provided in the display portion 102, and are located atthe same interval (or pitch) as that of the gate signal lines 142.

FIG. 44B shows another example of second sensor electrodes 116. In thesecond sensor electrodes 116 shown in FIG. 44B, the electrode portion125, including diamond-shaped electrode patterns, has a lattice patternincluding a plurality of squares. The lattice pattern in the electrodeportion 125 is provided such that lines of squares that are arrayedparallel to the gate signal line 142 each have a line width that issubstantially equal to that of each of the gate signal lines 142, andare located at the same interval (or pitch) as that of the gate signallines 142. The lattice pattern in the electrode portion 125 is providedsuch that lines of squares that are arrayed parallel to the data signalline 144 each have a line width that is substantially equal to that ofeach of the data signal lines 144, and are located at the same interval(or pitch) as that of the data signal lines 144. Alternatively, thelattice pattern in the electrode portion 125 may be provided such thatthe lines of squares that are arrayed parallel to the gate signal line142 each have a line width that is substantially equal to that of eachof the gate signal lines 142, and are located at the same interval (orpitch) as that of the gate signal lines 142; and such that the lines ofsquares that are arrayed parallel to the data signal line 144 each havea line width that is substantially equal to that of each of the datasignal lines 144, and are located at three times the interval (or pitch)of that of the data signal lines 144.

In this embodiment, the first sensor electrodes 114 and the secondsensor electrodes 116 are formed of a metal film of aluminum (Al),titanium (Ti), molybdenum (Mo), copper (Cu) or the like. Therefore, thefirst sensor electrodes 114 and the second sensor electrodes 116 have alow resistance. In addition, like in the eleventh embodiment, analignment marker may be formed in the transparent resin substrate 124during the formation of the first sensor electrodes 114 and the secondsensor electrodes 116. Therefore, the first sensor electrodes 114 andthe second sensor electrodes 116 are positionally matched precisely withthe gate signal lines 144 and the data signal lines 144.

The first sensor electrodes 114 and the second sensor electrodes 116 inthis embodiment have the same line width as that of the gate signal line142 and the data signal line 144, and are located at the same pitch asthat of the gate signal lines 142 and the data signal lines 144.Therefore, even in the case where the touch panel display is of a bottomemission-type, the touch sensor 108 is embedded in the transparent resinsubstrate 124 without decreasing the aperture ratio of the pixels. Inaddition, the first sensor electrodes 114 and the second sensorelectrodes 116 are formed of a metal material, so that the resistance isdecreased.

This embodiment may be appropriately combined with the touch sensor ofthe touch panel display in any of the first embodiment to the tenthembodiment.

Thirteenth Embodiment

In this embodiment, forms of the first sensor electrodes 114 and thesecond sensor electrodes 116 forming the touch sensor 108 will bedescribed. The first sensor electrodes 114 and the second sensorelectrodes 116 forming the touch sensor 108 in this embodimentcorrespond to a diamond PenTile matrix of the pixels.

FIG. 45A shows an example of first sensor electrodes 114. The firstsensor electrodes 114 shown in FIG. 45A is formed of a metal film, has astrip-like shape, and includes a connection portion 123 and an electrodeportion 121. The electrode portion 121 includes a mesh patterncorresponding to pixels located in a diamond PenTile matrix. The mesh ofthe metal material is located in positional correspondence with a regionwhere light is not emitted from the pixels. The connection portion 123includes a two-dimensional solid pattern of a metal film (the connectionportion 123 is entirely formed of a metal material). In the exampleshown in FIG. 45B, the electrode portion 123 of the first sensorelectrodes 114 includes diamond-shaped electrode patterns, and alsoincludes a mesh pattern corresponding to pixels located in a diamondPenTile matrix.

FIG. 46A shows an example of second sensor electrodes 116. The secondsensor electrodes 116 shown in FIG. 46A is formed of a metal film, has astrip-like shape, and includes a connection portion 127 and an electrodeportion 125. The electrode portion 125 includes a mesh patterncorresponding to pixels located in a diamond PenTile matrix. The mesh ofthe metal material is located in positional correspondence with a regionwhere light is not emitted from the pixels. The connection portion 127includes a two-dimensional solid pattern of a metal film (the connectionportion 127 is entirely formed of a metal material). In the exampleshown in FIG. 46B, the electrode portion 125 of the second sensorelectrodes 116 includes diamond-shaped electrode patterns, and alsoincludes a mesh pattern corresponding to pixels located in a diamondPenTile matrix.

The mesh patterns of the electrode portions 121 and 125 each merely needto have an opening pattern enclosing a set of two sub pixelscorresponding to green, one sub pixel corresponding to red and one subpixel corresponding to blue (one set of sub pixels). The mesh patternmay each have an opening pattern enclosing four or nine sets of the subpixels.

The first sensor electrodes 114 shown in FIG. 45A and the second sensorelectrodes 116 shown in FIG. 46A are located in an overlapping mannerwith an insulating layer being located between the first sensorelectrodes 114 and the second sensor electrodes 116. In this case, themesh pattern of the electrode portion 121 of the first sensor electrodes114, and the mesh pattern of the electrode portion 125 of the secondsensor electrodes 116, may be located to overlapping each other.Alternatively, the mesh pattern of the electrode portion 121 and themesh pattern of the electrode portion 125 may be shifted from eachother. In any way, the mesh pattern is located so as not to overlap thelight emitting regions of the pixels, so that the aperture ratio of thepixels is not decreased. The mesh pattern of a metal material enclosesthe pixels, and thus acts as a light blocking film (also referred to asa “black matrix”) to improve the image quality.

This embodiment may be appropriately combined with the touch sensor ofthe touch panel display in any of the first embodiment to the tenthembodiment.

Fourteenth Embodiment

In this embodiment, a form of connection structure between the firstsensor electrodes 114 and the second sensor electrodes 116 with drawingwires will be described.

FIG. 47A shows an example of connection structure between the firstsensor electrode 114 and a first drawing wire 194 a. The first sensorelectrode 114 is connected with the first drawing wire 194 a in a regionouter to the display portion 102. The first sensor electrode 114 isprovided between the first transparent resin layer 150 a and the secondtransparent resin layer 150 b, and the first drawing wire 194 a isprovided on the fourth transparent resin layer 150 d.

As shown in FIG. 47A, the first insulating layer 158, the secondinsulating layer 164 and the flattening layer 172 are stacked on thefourth transparent resin layer 150 d, and the second electrode 192 isprovided on the flattening layer 172. FIG. 47A shows that the sealinglayer 128 is further provided on the second electrode 192. The sealinglayer 128 may have any structure. In this embodiment, the sealing layer128 includes a carbon nitride film 196 a, a silicon nitride film 198 anda carbon nitride film 196 b are stacked in this order. The carbonnitride film 196 is a polymerized film formed by plasma polymerizationusing, as material gas, hydrogen carbide gas such as methane (CH4) ofthe like and gas such as nitrogen (N₂), ammonia (HN₃) or the like.Meanwhile, the silicon nitride film 198 is formed by plasma CVD using,as material gas, silane (SiH₄), ammonia (NH₃), and nitrogen (N₂). Theplasma polymerized film such as the carbon nitride film 196 or the likehas properties of having no pinhole, having a high level of stepcoverage, and having a small inner stress. The carbon nitride film 196having such properties and the silicon nitride film 198 are combined, sothat the sealing layer 128 having a high level of water vapor blockingproperty is provided.

The first drawing wire 194 a is electrically connected with the firstsensor electrode 114 via a contact hole 195 running through the secondtransparent resin layer 150 b, the third transparent resin layer 150 cand the fourth transparent resin layer 150 d. The first drawing wire 194a is drawn to the outside of the flattening layer 172 and the sealinglayer 128. The first drawing wire 194 a may be formed to be connectedwith the terminal electrode 118 in a region exposed from the sealinglayer 128.

FIG. 47A shows a form in which the transparent resin substrate 124 isprovided on the support substrate 200 and the division region 202 isprovided in the vicinity of the terminal electrode 118 (FIG. 1). Thedivision region 202 is an opening running through the transparent resinsubstrate 124. The division region 202 is formed by, for example, laserprocessing. The division region 202 is formed as an open groovecontinuous so as to enclose the display panel. After the division region202 is formed, the transparent resin substrate 124 may be delaminatedfrom the support substrate 200 by laser ablation as described above inthe first embodiment.

It is preferred that the first transparent resin layer 150 a is formedof a transparent polyimide resin. The transparent polyimide resin issofter than a transparent para-polyamide resin and has a high level ofheat resistance, and therefore has an advantage of not generating amodified layer even by laser ablation. It is preferred that the fourthtransparent resin layer 150 d is formed of a transparent para-polyamideresin. The first drawing wire 194 a and the terminal electrode 118(shown in FIG. 1) are provided on the fourth transparent resin layer 150d. The transparent para-polyamide resin is harder than the transparentpolyimide resin, and therefore, prevents the metal film used to form thefirst drawing wire 194 a and the terminal electrode 118 from coming off.The flexible printed circuit board 122 as shown in FIG. 1 may bethermally press-fit to the terminal electrode 118, so that thedeformation of the transparent resin substrate 124 is suppressed.

FIG. 47B shows an example of connection structure between the secondsensor electrode 116 and a second drawing wire 194 b. The second sensorelectrode 116 is connected with the second drawing wire 194 b in aregion outer to the display portion 102. The second sensor electrode 116is provided between the second transparent resin layer 150 b and thethird transparent resin layer 150 c, and the second drawing wire 194 bis provided on the fourth transparent resin layer 150 d. It is preferredthat the fourth transparent resin layer 150 d is formed of a transparentpara-polyamide resin from the point of view of gas barrier property ofpreventing permeation of water vapor.

The second drawing wire 194 b is electrically connected with the secondsensor electrode 116 via a contact hole 195 b running through the thirdtransparent resin layer 150 c and the fourth transparent resin layer 150d. The second drawing wire 194 b is drawn onto the second informationlayer 164 so as to be connected with the third driving circuit 112 c. InFIG. 47B, the third driving circuit 112 c is omitted.

As shown in FIG. 48A, the first insulating layer 158 and the secondinsulating layer 164 may be extended to the outside of the flatteninglayer 172. With such a structure, in a region where the first drawingwire 194 a is not provided as shown in FIG. 48B, the second insulatinglayer 164 formed of an inorganic insulating film and the sealing layer128 formed of an inorganic insulating film are provided in close contactwith each other. The second insulating layer 164 and the sealing layer128 are in close contact with each other in a region outer to theflattening layer 172, so that entrance of moisture is prevented and thesealing capability is improved.

As shown in FIG. 49, the first drawing wire 194 a may be electricallyconnected with the second drawing wire 194 b (including a transparentconductive film 194 b 1 and a metal film 194 b 2) via a contact hole 195c formed in the second insulating layer 164, the first insulating layer158 and the fourth transparent resin layer 150 d. The second drawingwire 194 b may be electrically connected with a drawing wire 194 c viathe contact hole 195 b formed in the third transparent resin layer 150c. The drawing wire 194 c may be electrically connected with the firstsensor electrode 114 via the first contact hole 195 a formed in thesecond transparent resin layer 150 b. The drawing wires 194 are coupledwith each other via the contact holes formed in the transparent resinlayers 150, so that each of the contact holes is made shallow and thusthe electrical connection is guaranteed.

In this embodiment, the contact holes 195 running through thetransparent resin layers 150 are provided. Therefore, even in the casewhere the first sensor electrodes 114 and the second sensor electrodes116 forming the touch sensor 108 are embedded in the transparent resinsubstrate 124, the drawing wires 194 are drawn to an upper level and areconnected with the terminal electrode 118 and the driving circuit 112.

Supplementary Notes

The entirety of, or a part of, the illustrative embodiments disclosedabove may be defined by the following supplementary notes. Anyembodiment of the present invention is not limited to any of thefollowing.

Supplementary Note 1

A method for manufacturing a touch panel display, the method includeforming a transparent resin substrate including a touch sensor includinga first sensor electrode extending in a first direction and a secondsensor electrode extending in a second direction crossing the firstdirection, forming a shield electrode covering the touch sensor; andforming, on the transparent resin substrate, a display portion includingpixels each including a transistor and an organic electroluminescenceelement electrically connected with the transistor.

Supplementary Note 2

The method for manufacturing a touch panel display according tosupplementary note 1, in which the formation of the transparent resinsubstrate includes: forming a first transparent resin layer on a supportsubstrate, forming the first sensor electrode extending in the firstdirection on the first transparent resin layer, forming a secondtransparent resin layer on the first transparent resin layer and thefirst sensor electrode, forming the second sensor electrode, extendingin the second direction crossing the first direction, on the secondtransparent resin layer, forming a third transparent resin layer on thesecond transparent resin layer and the second sensor electrode, formingthe shield electrode on the third transparent resin layer, and forming afourth transparent resin layer on the shield electrode.

Supplementary Note 3

The method for manufacturing a touch panel display according tosupplementary note 2, in which the first transparent resin layer, thesecond transparent resin layer, the third transparent resin layer andthe fourth transparent resin layer are formed of a transparentpara-polyamide resin or a transparent polyimide resin.

Supplementary Note 4

The method for manufacturing a touch panel display according tosupplementary note 2, in which the first transparent resin layer isformed of a transparent polyimide resin, the fourth transparent resinlayer is formed of a transparent para-polyamide resin, and the secondtransparent resin layer and the third transparent resin layer are formedof a transparent para-polyamide resin or a transparent polyimide resin.

Supplementary Note 5

The method for manufacturing a touch panel display according tosupplementary note 2, in which the first transparent resin layer and thethird transparent resin layer are formed of a para-polyamide resin or apolyimide resin, and the second transparent resin layer is formed of asilicon nitride film or an aluminum oxide film.

Supplementary Note 6

The method for manufacturing a touch panel display according tosupplementary note 1, in which the first sensor electrode and the secondfirst sensor electrode are each formed of a transparent conductive film.

Supplementary Note 7

The method for manufacturing a touch panel display according tosupplementary note 1, in which the first sensor electrode and the secondfirst sensor electrode are each formed of a transparent conductive filmand formed to have a stripe pattern or a mesh pattern having openings atpositions different from positions of the pixels.

Supplementary Note 8

The method for manufacturing a touch panel display according tosupplementary note 1, in which the shield electrode is formed of atransparent conducive film.

Supplementary Note 9

The method for manufacturing a touch panel display according tosupplementary note 1, in which the transistor is formed to include afirst gate electrode, a first insulating layer on the first gateelectrode, a semiconductor layer on the first insulating layer, a secondinsulating layer on the semiconductor layer, and a second gate electrodeon the second insulating layer.

Supplementary Note 10

The method for manufacturing a touch panel display according tosupplementary note 9, further including forming an opening in the shieldelectrode in a region overlapping the transistor, and forming the firstgate electrode in the opening.

Supplementary Note 11

The method for manufacturing a touch panel display according tosupplementary note 9, in which the first gate electrode is formed incontact with the shield electrode.

Supplementary Note 12

The method for manufacturing a touch panel display according tosupplementary note 10, in which the opening of the shield electrode andthe first gate electrode are formed by patterning by use of onephotomask.

Supplementary Note 13

The method for manufacturing a touch panel display according tosupplementary note 12, in which a multiple tone mask is used as thephotomask.

Supplementary Note 14

The method for manufacturing a touch panel display according tosupplemental note 2, further including an opening in the second sensorelectrode in a region overlapping the transistor.

Supplementary Note 15

A touch panel display, including a display portion including a videosignal line and a scanning signal line, a touch sensor electrodeincluding a first sensor electrode (receiver electrode) and a secondsensor electrode (transmitter electrode), and a driving circuit locatedouter to the display portion and the touch sensor. the driving circuitincludes a video signal line driving circuit outputting a video signalto the video signal line, a scanning signal line driving circuitoutputting a timing signal, synchronized to the video signal, to thescanning signal line, a sensing circuit receiving a detection signaloutput from the first sensor electrode (receiver electrode) andoutputting a sensing signal, and a scanning circuit outputting a drivingsignal to the second sensor electrode (transmitter electrode). Thedriving circuit includes the video signal line driving circuit, thescanning signal line driving circuit, the sensing circuit and thescanning circuit in an integrated manner.

Supplementary Note 16

The touch panel display according to supplementary note 15, in which thedriving circuit is included in a single semiconductor chip in anintegrated manner.

Supplementary Note 17

The touch panel display according to supplementary note 15, in which thedriving circuit includes the video signal line driving circuit, thescanning signal line driving circuit, the sensing circuit and thescanning circuit in an integrated manner as blocks.

Supplementary Note 18

The touch panel display according to supplementary note 15, in which thedisplay portion includes a plurality of pixels, and the plurality ofpixels each include an organic electroluminescence element.

What is claimed is:
 1. A touch panel display, comprising: a transparentsubstrate; a touch sensor including a first sensor electrode and asecond sensor electrode embedded in the transparent substrate; a displayportion disposed on the transparent substrate and including a pluralityof pixels, a plurality of scanning signal lines, and a plurality ofvideo signal lines; a sealing layer covering the display portion; adriver IC; a first driving circuit connected with the plurality ofscanning signal lines; and a second driving circuit connected with thesecond sensor electrode, wherein the touch sensor and the displayportion overlap each other in a plan view, the first sensor electrodeand the second sensor electrode are disposed between different layers ofa plurality of transparent resin layers, the first sensor electrode iselectrically connected to the driver IC by a first drawing wiring via afirst contact hole through at least one transparent resin layer of theplurality of transparent resin layers, the second sensor electrode iselectrically connected to the second driving circuit by a second drawingwiring via a second contact hole through at least one transparent resinlayer of the plurality of transparent resin layers, and the firstcontact hole and the second contact hole are covered with the sealinglayer.
 2. The touch panel display according to claim 1, wherein theplurality of transparent resin layers comprises a first transparentresin layer, a second transparent resin layer, and a third transparentresin layer, the first sensor electrode is disposed between the firsttransparent resin layer and the second transparent resin layer, and thesecond sensor electrode is disposed between the second transparent resinlayer and the third transparent resin layer.
 3. The touch panel displayaccording to claim 2, wherein each of the plurality of pixels includes abottom emission type organic electroluminescence element.
 4. The touchpanel display according to claim 3, wherein the sealing layer coveringthe display portion, the first driving circuit, and the second drivingcircuit.
 5. The touch panel display according to claim 4, furthercomprising a light transmissive shield electrode between the touchsensor and the display portion, wherein the first contact hole and thesecond contact hole are disposed outside the transmissive shieldelectrode.
 6. The touch panel display according to claim 5, wherein thelight transmissive shield electrode is disposed on the third transparentresin layer, and the transmissive shield electrode is covered with afourth transparent resin layer.
 7. The touch panel display according toclaim 6, wherein the transparent substrate comprises the firsttransparent resin layer, the second transparent resin layer, and thethird transparent resin layer.
 8. The touch panel display according toclaim 4, wherein the sealing layer is formed of two different layers ofa carbon nitride film and a silicon nitride thin film.
 9. The touchpanel display according to claim 4, wherein the sealing layer is formedof a carbon nitride film, a first silicon nitride film, and a secondcarbon nitride film.
 10. The touch panel display according to claim 1,wherein the second driving circuit is disposed between an end portion ofthe transparent substrate and the display portion, and the first drivingcircuit is disposed between the second driving circuit and the displayportion.
 11. The touch panel display according to claim 1, wherein thefirst driving circuit and the second driving circuit are disposed on afirst side of the display portion and a second side opposite to thefirst side of the display portion.
 12. The touch panel display accordingto claim 1, further comprising a driver IC, wherein the driver ICincludes a video signal processing circuit and a sensor signalprocessing circuit.
 13. A touch panel display, comprising: a transparentsubstrate; a touch sensor including a first sensor electrode and asecond sensor electrode embedded in the transparent substrate; a displayportion disposed on the transparent substrate and including a pluralityof pixels, a plurality of scanning signal lines, and a plurality ofvideo signal lines; a sealing layer covering the display portion; adriver IC; a first driving circuit connected with the plurality ofscanning signal lines; and a second driving circuit connected with thesecond sensor electrode, wherein the touch sensor and the displayportion overlap each other in a plan view, the first sensor electrodeand the second sensor electrode are disposed between different layers ofa plurality of transparent resin layers, the first sensor electrodeincludes a first electrode portion overlapping the display portion, andat least one first connection portion not overlapping the displayportion, the first sensor electrodes are connected to the driver IC by afirst lead wiring via a first contact hole through at least onetransparent resin layer of the plurality of transparent resin layers,the second sensor electrodes are connected to the second driving circuitby a second lead wiring via a second contact hole through at least onetransparent resin layer of the plurality of transparent resin layers,and the first contact hole and the second contact hole are covered withthe sealing layer.
 14. The touch panel display according to claim 13,wherein the plurality of transparent resin layers comprises a firsttransparent resin layer, a second transparent resin layer, and a thirdtransparent resin layer, the first sensor electrode is disposed betweenthe first transparent resin layer and the second transparent resinlayer, the second sensor electrode is disposed between the secondtransparent resin layer and the third transparent resin layer, and thecontact hole is through the third transparent resin layer.
 15. The touchpanel display according to claim 13, wherein the first electrode portionand the second electrode portion have a lattice pattern, and the atleast one first connection portion and the at least one secondconnection portion have a solid pattern.
 16. The touch panel displayaccording to claim 15, wherein the lattice pattern overlaps theplurality of scanning signal lines and the plurality of video signallines.
 17. The touch panel display according to claim 16, wherein eachof the plurality of pixels includes a bottom emission type organicelectroluminescence element.
 18. The touch panel display according toclaim 17, wherein openings of the lattice pattern are arranged tooverlap the light emitting portions of the bottom emission type organicelectroluminescence element of the plurality of pixels.
 19. The touchpanel display according to claim 15, wherein the first sensor electrodeand the second sensor electrode are formed of at least one metalselected from aluminum (Al), titanium (Ti), molybdenum (Mo) and copper(Cu).
 20. The touch panel display according to claim 14, wherein thetransparent substrate comprises the first transparent resin layer, thesecond transparent resin layer, and the third transparent resin layer.